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Proceedings Papers

Microstructure and Morphology Analysis of DC-Magnetron Sputtered TiAlSi Thin Coatings on Glass, T42 High Speed Steel, and AISI 01 Tool Steel Substrates

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Job M. Wambua, Fredrick M. Mwema, Guillaume Zoppi, Wai-Lok Woo, Esther T. Akinlabi
Proc. ASME. IMECE2024, Volume 3: Advanced Materials: Design, Processing, Characterization and Applications; Advances in Aerospace Technology, V003T04A013, November 17–21, 2024
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2024-143417
https://doi.org/10.1115/IMECE2024-143417
View Paper titled, Microstructure and Morphology Analysis of DC-Magnetron Sputtered TiAlSi Thin Coatings on Glass, T42 High Speed Steel, and AISI 01 Tool Steel Substrates
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Topics: Coatings, Glass, Temperature, Thin films, Tool steel
Proceedings Papers

Mechanical Property Evaluation of Sublimation Agents on Nanostructure Stability in Semiconductor

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Yosuke Hanawa, Jianliang Zhang, Yuta Sasaki, Koichi Sawada, Junichi Yoshida, Minghan Xu, Mohammaderfan Mohit, Agus P. Sasmito, Atsushi Sakuma
Proc. ASME. IMECE2024, Volume 9: Heat Transfer and Thermal Engineering, V009T11A017, November 17–21, 2024
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2024-143402
https://doi.org/10.1115/IMECE2024-143402
View Paper titled, Mechanical Property Evaluation of Sublimation Agents on Nanostructure Stability in Semiconductor
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Topics: Collapse, Drying, Mechanical properties, Semiconductors (Materials), Stability, Nanostructures , Stress, Integrated circuit fabrication, Solidification, Thin films
Proceedings Papers

Selective Multilayer Thin-Film Development in Insects

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Ioannis N. Miaoulis, Haruna Tada, Seth Mann, Peter Y. Wong
Proc. ASME. IMECE97, Advances in Heat and Mass Transfer in Biotechnology, 33-40, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-1309
https://doi.org/10.1115/IMECE1997-1309
View Paper titled, Selective Multilayer Thin-Film Development in Insects
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Topics: Thin films, Reflectance, Absorption, Film thickness, Microscale devices, Solar energy, Sunlight
Proceedings Papers

Lunar Dust Tolerance and Mitigation of Space Suits Through Nano Fabricated Electrostatic Cleaning

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Voss Harrigan, Korey Carter, Marcus Gilmore, Jiajun Xu
Proc. ASME. IMECE2023, Volume 8: Engineering Education, V008T09A023, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-114192
https://doi.org/10.1115/IMECE2023-114192
View Paper titled, Lunar Dust Tolerance and Mitigation of Space Suits Through Nano Fabricated Electrostatic Cleaning
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Topics: Aerospace engineering, Astronauts, Design, Dust, Nanofabrication, Particulate matter, Reliability, Safety, Soil, Systems engineering
Proceedings Papers

Experimental Investigation of the Nano-Fin Effect (nFE) During Thin Film Evaporation From Nanopores Using Temperature Nano-Sensors

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Juliet Shafer, Jonghyun Lee, Debjyoti Banerjee
Proc. ASME. IMECE2023, Volume 10: Heat Transfer and Thermal Engineering, V010T11A064, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-117183
https://doi.org/10.1115/IMECE2023-117183
View Paper titled, Experimental Investigation of the Nano-Fin Effect (nFE) During Thin Film Evaporation From Nanopores Using Temperature Nano-Sensors
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Topics: Evaporation, Membranes, Nanopores, Nanosensors, Temperature, Thermocouples, Thin film transistors, Thin films
Proceedings Papers

Theoretical Study of Counter-Current Liquid-Vapor Flow Under Condensation Conditions Over Non-Isothermal Vertical Wall of Two-Phase Closed Thermosyphon

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Mohammad Zolfagharroshan, Minghan Xu, Ahmad Zueter, Agus Sasmito
Proc. ASME. IMECE2023, Volume 10: Heat Transfer and Thermal Engineering, V010T11A043, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-112692
https://doi.org/10.1115/IMECE2023-112692
View Paper titled, Theoretical Study of Counter-Current Liquid-Vapor Flow Under Condensation Conditions Over Non-Isothermal Vertical Wall of Two-Phase Closed Thermosyphon
Open the PDF for Theoretical Study of Counter-Current Liquid-Vapor Flow Under Condensation Conditions Over Non-Isothermal Vertical Wall of Two-Phase Closed Thermosyphon in another window
Topics: Condensation, Flow (Dynamics), Heat transfer, Vapors, Condensers (steam plant), Film thickness, Shear stress, Temperature, Computer simulation, Evaporation
Proceedings Papers

A Comparative Study on Conductive Polyimide Composite Thin Films Containing Indium-Tin-Oxide and Silver Nanoparticles

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Zeynel Guler, Nathan Jackson
Proc. ASME. IMECE2023, Volume 12: Micro- and Nano-Systems Engineering and Packaging, V012T13A001, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-113199
https://doi.org/10.1115/IMECE2023-113199
View Paper titled, A Comparative Study on Conductive Polyimide Composite Thin Films Containing Indium-Tin-Oxide and Silver Nanoparticles
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Topics: Composite materials, Microelectromechanical systems, Nanoparticles, Silver, Thin films
Proceedings Papers

Integration of Printed Circuit Board (PCB) Interface to Quartz Crystal Microbalance (QCM) for Gas Adsorption Testbed

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Thi Kieu Ngan Pham, Matthew Nakamura, Joseph J. Brown
Proc. ASME. IMECE2023, Volume 12: Micro- and Nano-Systems Engineering and Packaging, V012T13A022, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-112176
https://doi.org/10.1115/IMECE2023-112176
View Paper titled, Integration of Printed Circuit Board (PCB) Interface to Quartz Crystal Microbalance (QCM) for Gas Adsorption Testbed
Open the PDF for Integration of Printed Circuit Board (PCB) Interface to Quartz Crystal Microbalance (QCM) for Gas Adsorption Testbed in another window
Topics: Distributed power generation, Printed circuit boards, Quartz crystals, Thin films
Proceedings Papers

Evaluation of Myotubes Orientation Cultured on Scaffold Film by Micromarkers Matrix

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Shigehiro Hashimoto, Shusei Sakai, Shunsuke Saito
Proc. ASME. IMECE2023, Volume 12: Micro- and Nano-Systems Engineering and Packaging, V012T13A009, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-112503
https://doi.org/10.1115/IMECE2023-112503
View Paper titled, Evaluation of Myotubes Orientation Cultured on Scaffold Film by Micromarkers Matrix
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Topics: Biomedical engineering, Electrodes, Optical microscopy, Photolithography, Thin films
Proceedings Papers

Tension-Tension Fatigue of Copper Thin Films

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David T. Read
Proc. ASME. IMECE96, Structural Analysis in Microelectronics and Fiber Optics, 175-180, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0732
https://doi.org/10.1115/IMECE1996-0732
View Paper titled, Tension-Tension Fatigue of Copper Thin Films
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Topics: Copper, Fatigue, Tension, Thin films, Stress, Cycles, Electrons, Fatigue testing, Feedback, Piezoelectric actuators
Proceedings Papers

Heat Transport in the Perpendicular Direction of Superlattices and Periodic Thin-Film Structures

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G. Chen
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 13-24, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1331
https://doi.org/10.1115/IMECE1996-1331
View Paper titled, Heat Transport in the Perpendicular Direction of Superlattices and Periodic Thin-Film Structures
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Topics: Heat, Superlattices, Thin films, Interfacial thermal resistance, Boundary-value problems, Electromagnetic scattering, First law of thermodynamics, Heat transfer, Integral equations, Mean free path
Proceedings Papers

Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-T c Superconductors

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Patrick E. Phelan
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 99-105, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1342
https://doi.org/10.1115/IMECE1996-1342
View Paper titled, Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-T c Superconductors
Open the PDF for Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-T c Superconductors in another window
Topics: Interfacial thermal resistance, Thin films, Temperature, Acoustics, Design, Electromagnetic scattering, High temperature, Phonons, Sensors, Switches
Proceedings Papers

New Methods of Measuring a Key Elastic-Piezoelectric Constant of Thin Films

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Fred J. von Preissig, Hong Zeng, Eun Sok Kim
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 307-312, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1366
https://doi.org/10.1115/IMECE1996-1366
View Paper titled, New Methods of Measuring a Key Elastic-Piezoelectric Constant of Thin Films
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Topics: Thin films, Transducers, Actuators, Composite materials, Sensors
Proceedings Papers

A Technique for Determining the Poisson’s Ratio of Thin Films

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Peter Krulevitch
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 319-323, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1368
https://doi.org/10.1115/IMECE1996-1368
View Paper titled, A Technique for Determining the Poisson’s Ratio of Thin Films
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Topics: Poisson ratio, Thin films, Plates (structures), Stress, Calibration, Cantilever beams, Errors, Micromachining
Proceedings Papers

Computation of Supersonic Flow for Thin Film Deposition Using Expansion Through a Skimmer

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Iain D. Boyd, Gang Chen
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 169-176, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1349
https://doi.org/10.1115/IMECE1996-1349
View Paper titled, Computation of Supersonic Flow for Thin Film Deposition Using Expansion Through a Skimmer
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Topics: Computation, Supersonic flow, Thin films, Simulation, Monte Carlo methods, Design, Flow (Dynamics), Gasdynamics, Hydrogen, Nonequilibrium flow
Proceedings Papers

Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process

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Jong Hyun Lee, Kyung Ho Park, Chun Su Lee, Jong Tae Baek, Chang-Jin Kim, Hyung Joun Yoo
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 373-377, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1377
https://doi.org/10.1115/IMECE1996-1377
View Paper titled, Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process
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Topics: Etching, Manufacturing, Microactuators, Micromachining, Polysilicon, Chemical etching, Stiction, Stress, Thin films, Vapors
Proceedings Papers

Micromechanical Structures for Fracture Testing of Brittle Thin Films

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Peter T. Jones, George C. Johnson, Roger T. Howe
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 325-330, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1369
https://doi.org/10.1115/IMECE1996-1369
View Paper titled, Micromechanical Structures for Fracture Testing of Brittle Thin Films
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Topics: Brittleness, Fracture (Materials), Fracture (Process), Testing, Thin films, Polysilicon, Cantilever beams, Cantilevers, Design, Displacement
Proceedings Papers

Design and Fabrication of the Fundamental Components Integrated to Realize a Functional Silicon Micromachined Gas Chromatography System

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Edward S. Kolesar, Rocky R. Reston
Proc. ASME. IMECE96, Engineering Systems, 11-17, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0869
https://doi.org/10.1115/IMECE1996-0869
View Paper titled, Design and Fabrication of the Fundamental Components Integrated to Realize a Functional Silicon Micromachined Gas Chromatography System
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Topics: Design, Gas chromatography, Manufacturing, Micromachining, Silicon, Nitrogen, Sensors, Circuits, Ejectors, Borosilicate glasses
Proceedings Papers

Feasibility of Far-Infrared Radiation Modulators Using High- T C Superconductors

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Z. M. Zhang
Proc. ASME. IMECE96, Heat Transfer: Volume 1 — Heat Transfer in Microgravity Systems; Radiative Heat Transfer and Radiative Heat Transfer in Low-Temperature Environments; Thermal Contact Conductance and Inverse Problems in Heat Transfer, 187-194, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0043
https://doi.org/10.1115/IMECE1996-0043
View Paper titled, Feasibility of Far-Infrared Radiation Modulators Using High- T C Superconductors
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Topics: Radiation (Physics), Reflectance, Thin films, Design
Proceedings Papers

Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes

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Masato Ikegawa
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 183, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1044
https://doi.org/10.1115/IMECE1996-1044
View Paper titled, Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes
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Topics: Flow (Dynamics), Heat transfer, Integrated circuit fabrication, Semiconductor wafers, Manufacturing, Particulate matter, Chemical reactions, Chemical vapor deposition, Contamination, Etching