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Proceedings Papers

Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process

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Jong Hyun Lee, Kyung Ho Park, Chun Su Lee, Jong Tae Baek, Chang-Jin Kim, Hyung Joun Yoo
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 373-377, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1377
https://doi.org/10.1115/IMECE1996-1377
View Paper titled, Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process
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Topics: Etching, Manufacturing, Microactuators, Micromachining, Polysilicon, Chemical etching, Stiction, Stress, Thin films, Vapors
Proceedings Papers

Valve Stiction in Reciprocating Compressors

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B. G. Shiva Prasad, Daniel Panayil
Proc. ASME. IMECE96, Advanced Energy Systems, 171-180, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0272
https://doi.org/10.1115/IMECE1996-0272
View Paper titled, Valve Stiction in Reciprocating Compressors
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Topics: Compressors, Stiction, Valves, Dynamics (Mechanics), Evacuations, Magnetic recording, Reliability, Surface tension, Tribology
Proceedings Papers

Design of a Hemispherical Magnetic Levitation Haptic Interface Device

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Peter J. Berkelman, Zack J. Butler, Ralph L. Hollis
Proc. ASME. IMECE96, Dynamic Systems and Control, 483-488, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0373
https://doi.org/10.1115/IMECE1996-0373
View Paper titled, Design of a Hemispherical Magnetic Levitation Haptic Interface Device
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Topics: Design, Haptics, Magnetic levitation, Actuators, Rotation, Center of mass, Dynamics (Mechanics), Linkages, Resolution (Optics), Robots
Proceedings Papers

Sticking to the Point: A Friction and Adhesion Model for Simulated Surfaces

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Jun Chen, Christopher DiMattia, Russell M. Taylor, II, Mike Falvo, Pichet Thiansathaporn, Richard Superfine
Proc. ASME. IMECE97, Dynamic Systems and Control, 167-171, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-0392
https://doi.org/10.1115/IMECE1997-0392
View Paper titled, Sticking to the Point: A Friction and Adhesion Model for Simulated Surfaces
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Topics: Adhesion, Friction, Physics, Haptics, Stiction
Proceedings Papers

Actuator Bearing Greases: Their Effect on Aerosol Contamination in Disk Drives

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Walter Prater, Garvin Stone
Proc. ASME. IMECE97, 8th International Symposium on Information Storage and Processing Systems, 69-73, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-0583
https://doi.org/10.1115/IMECE1997-0583
View Paper titled, Actuator Bearing Greases: Their Effect on Aerosol Contamination in Disk Drives
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Topics: Actuators, Aerosols, Bearings, Contamination, Disks, Particulate matter, Thickening agents, Mineral oil, Stiction, Cascades (Fluid dynamics)
Proceedings Papers

Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates

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Zhimin J. Yao, Chuck Goldsmith, Susan Eshelman, David Denniston
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 69-73, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-0941
https://doi.org/10.1115/IMECE1997-0941
View Paper titled, Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates
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Topics: Cantilevers, Design, Electrical resistivity, Manufacturing, Membranes, Metals, Micromachining, Microwaves, Signals, Silicon
Proceedings Papers

Self-Assembled Microslider for Microjoinery

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L.-S. Huang, B. Sridharan, C.-J. Kim, S. D. Collins, C. González, R. L. Smith
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 499-504, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1291
https://doi.org/10.1115/IMECE1998-1291
View Paper titled, Self-Assembled Microslider for Microjoinery
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Topics: Self-assembly, Manufacturing, Semiconductor wafers, Bonding, Etching, Anisotropy, Clearances (Engineering), Friction, Micromachining, Polishing
Proceedings Papers

Hydraulic Single Axis Vehicle Motion Simulator: Hardware and High Fidelity Control Design

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Jeffrey L. Kuehn, Derrick R. Harris, David S. Epp, William N. Patten
Proc. ASME. IMECE98, Vibration and Noise Control, 161-166, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-0415
https://doi.org/10.1115/IMECE1998-0415
View Paper titled, Hydraulic Single Axis Vehicle Motion Simulator: Hardware and High Fidelity Control Design
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Topics: Design, Hardware, Vehicles, Degrees of freedom, Stiction
Proceedings Papers

Nanosecond Laser Experiments of Microstructure Adhesion Reduction

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James W. Rogers, Leslie M. Phinney
Proc. ASME. IMECE99, Heat Transfer: Volume 3, 25-30, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-1059
https://doi.org/10.1115/IMECE1999-1059
View Paper titled, Nanosecond Laser Experiments of Microstructure Adhesion Reduction
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Topics: Adhesion, Lasers, Microcantilevers, Stiction, Cantilevers, Fluence (Radiation measurement), Nd-YAG lasers, Polysilicon
Proceedings Papers

Design, Fabrication and Characterization of Micromirror Array for Display Application

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H. Shin, H. Ko, Y. Yoon, B. Choi
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 303-307, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0284
https://doi.org/10.1115/IMECE1999-0284
View Paper titled, Design, Fabrication and Characterization of Micromirror Array for Display Application
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Topics: Design, Manufacturing, Mirrors, Coating processes, Coatings, Stiction, Brightness (Photometry), Cycles, Electronics, Engineering prototypes
Proceedings Papers

A Stiction Study via C-V Plot Electrostatic Actuation/Latching

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Gary O’Brien, Liwei Lin, David J. Monk
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 275-281, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0280
https://doi.org/10.1115/IMECE1999-0280
View Paper titled, A Stiction Study via C-V Plot Electrostatic Actuation/Latching
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Topics: Stiction, Adhesion, Polysilicon, Elastic constants, Surface energy, Actuators, Capacitance, Capacitors, Microscale devices
Proceedings Papers

High-Aspect-Ratio Electroplated Structures With 2μm Beamwidth

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Xiaobin Li, Siddharth Kiyawat, Hector J. De Los Santos, Chang-Jin “CJ” Kim
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 25-30, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0241
https://doi.org/10.1115/IMECE1999-0241
View Paper titled, High-Aspect-Ratio Electroplated Structures With 2μm Beamwidth
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Topics: Bending (Stress), Cantilever beams, Cantilevers, Coating processes, Coatings, Electroplating, Flow (Dynamics), Nickel, Nickel plating, Optimization
Proceedings Papers

A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers

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James W. Rogers, Thomas J. Mackin, Leslie M. Phinney
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 157-165, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23823
https://doi.org/10.1115/IMECE2001/MEMS-23823
View Paper titled, A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers
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Topics: Adhesion, Microcantilevers, Microelectromechanical systems, Thermomechanics, Lasers, Fracture (Materials), Irradiation (Radiation exposure), Stiction, Fracture mechanics, Heating
Proceedings Papers

Analysis and Design of Electrothermal Actuators Fabricated From Single Crystal Silicon

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John M. Maloney, Don L. DeVoe, David S. Schreiber
Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 233-240, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1097
https://doi.org/10.1115/IMECE2000-1097
View Paper titled, Analysis and Design of Electrothermal Actuators Fabricated From Single Crystal Silicon
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Topics: Actuators, Crystals, Design, Silicon, Silicon-on-insulator, Deflection, Euler-Bernoulli beam theory, Heat conduction, Heating, Manganese (Metal)
Proceedings Papers

The Effects of Real and Computer Generated Friction on Human Performance in a Targeting Task

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Christopher Richard, Mark Cutkosky
Proc. ASME. IMECE2000, Dynamic Systems and Control: Volume 2, 1101-1108, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-2418
https://doi.org/10.1115/IMECE2000-2418
View Paper titled, The Effects of Real and Computer Generated Friction on Human Performance in a Targeting Task
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Topics: Computers, Friction, Stiction, Coulombs, Haptics
Proceedings Papers

A Comparison of the Capacity for Precise Motion Control Between Hinged Joints and Flexure Joints

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Chris Lusty, Nicola Y. Bailey, Patrick S. Keogh
Proc. ASME. IMECE2017, Volume 4A: Dynamics, Vibration, and Control, V04AT05A019, November 3–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2017-71350
https://doi.org/10.1115/IMECE2017-71350
View Paper titled, A Comparison of the Capacity for Precise Motion Control Between Hinged Joints and Flexure Joints
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Topics: Bending (Stress), Motion control, Displacement, Design, Hinges, Machine design, Machinery, Micromechanical devices, Modeling, Reliability
Proceedings Papers

Hybrid Probabilistic Physics of Failure Evaluation of Reliability in MEMS Devices

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Mohammad Pourgol Mohammad, Minoo Mobasher Moghaddam, Morteza Soleimani
Proc. ASME. IMECE2017, Volume 14: Emerging Technologies; Materials: Genetics to Structures; Safety Engineering and Risk Analysis, V014T14A002, November 3–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2017-70984
https://doi.org/10.1115/IMECE2017-70984
View Paper titled, Hybrid Probabilistic Physics of Failure Evaluation of Reliability in MEMS Devices
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Topics: Failure, Microelectromechanical systems, Physics, Reliability, Failure mechanisms, Switches, Design, Electric fields, Failure mode and effects analysis, Monte Carlo methods
Proceedings Papers

Frictional Torque Transfer Behaviors of Friction Pads in Wet Clutch Engagement

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Siyoul Jang
Proc. ASME. IMECE2015, Volume 15: Advances in Multidisciplinary Engineering, V015T19A039, November 13–19, 2015
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2015-53032
https://doi.org/10.1115/IMECE2015-53032
View Paper titled, Frictional Torque Transfer Behaviors of Friction Pads in Wet Clutch Engagement
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Topics: Friction, Torque, Lubrication, Sliding friction, Stiction, Friction materials, Vibration, Boundary lubrication, Boundary-value problems, Deformation
Proceedings Papers

Design the High-Speed Micro-Motion Controller for Peck Drilling With the LuGre Friction Model

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Cong-Sheng Huang, Syh-Shiuh Yeh, Pau-Lo Hsu
Proc. ASME. IMECE2014, Volume 4A: Dynamics, Vibration, and Control, V04AT04A001, November 14–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2014-36152
https://doi.org/10.1115/IMECE2014-36152
View Paper titled, Design the High-Speed Micro-Motion Controller for Peck Drilling With the LuGre Friction Model
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Topics: Control equipment, Design, Drilling, Friction, Errors, Computer numerical control machine tools, Machinery, Modeling, Stiction
Proceedings Papers

Actuator Array Dynamics Incorporating Actuator Inertia

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Mark D. Bedillion
Proc. ASME. IMECE2013, Volume 4A: Dynamics, Vibration and Control, V04AT04A003, November 15–21, 2013
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2013-62507
https://doi.org/10.1115/IMECE2013-62507
View Paper titled, Actuator Array Dynamics Incorporating Actuator Inertia
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Topics: Actuators, Dynamics (Mechanics), Inertia (Mechanics), Degrees of freedom, Friction, Simulation results, Stiction