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Proceedings Papers

Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates

M. Asheghi, M. N. Touzelbaev, K. E. Goodson, Y. K. Leung, S. S. Wong
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 83-91, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1340
https://doi.org/10.1115/IMECE1996-1340
View Paper titled, Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates
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Topics: Crystals, Silicon, Silicon-on-insulator, Temperature, Thermal conductivity, Semiconductor wafers, Phonons, Transistors, Cantilevers, Electromagnetic scattering
Proceedings Papers

Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors

Per G. Sverdrup, Y. Sungtaek Ju, Kenneth E. Goodson
Proc. ASME. IMECE99, Heat Transfer: Volume 3, 41-49, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-1061
https://doi.org/10.1115/IMECE1999-1061
View Paper titled, Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors
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Topics: Engineering simulation, Heat conduction, Silicon-on-insulator, Simulation, Transistors, Phonons, Silicon, Temperature, Thermal diffusion, Mean free path
Proceedings Papers

Micromechanical Devices With Embedded Electro-Thermal-Compliant Actuation

Timothy Moulton, G. K. Ananthasuresh
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 553-560, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0320
https://doi.org/10.1115/IMECE1999-0320
View Paper titled, Micromechanical Devices With Embedded Electro-Thermal-Compliant Actuation
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Topics: Blocks (Building materials), Design, Microelectromechanical systems, Microfabrication, Micromachining, Micromechanical devices, Silicon-on-insulator
Proceedings Papers

Tension Test With Single-Crystalline-Silicon Microspecimen

Taechung Yi, Chang-Jin “CJ” Kim
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 81-86, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0249
https://doi.org/10.1115/IMECE1999-0249
View Paper titled, Tension Test With Single-Crystalline-Silicon Microspecimen
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Topics: Silicon, Tension, Young's modulus, Silicon-on-insulator, Stress, Crystals, Interferometry, Lasers, Manufacturing, Micromachining
Proceedings Papers

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon

John M. Maloney, David S. Schreiber, Don L. DeVoe
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 289-296, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23842
https://doi.org/10.1115/IMECE2001/MEMS-23842
View Paper titled, Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon
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Topics: Crystals, Microelectromechanical systems, Micromotors, Reactive-ion etching, Silicon, Motors, Actuators, Silicon-on-insulator, Clamps (Tools), Compliant mechanisms
Proceedings Papers

Non-Equilibrium Thermal Effects in Power Transistors

Ashok Raman, D. G. Walker, T. S. Fisher
Proc. ASME. IMECE2001, Heat Transfer: Volume 7 — Heat Transfer in Electronic Equipment, Student Research, and Visualization Techniques, 253-259, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/HTD-24402
https://doi.org/10.1115/IMECE2001/HTD-24402
View Paper titled, Non-Equilibrium Thermal Effects in Power Transistors
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Topics: Equilibrium (Physics), Temperature effects, Transistors, Phonons, Silicon-on-insulator, Temperature, Acoustics, Simulation, Electrons, Heat
Proceedings Papers

Analysis and Design of Electrothermal Actuators Fabricated From Single Crystal Silicon

John M. Maloney, Don L. DeVoe, David S. Schreiber
Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 233-240, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1097
https://doi.org/10.1115/IMECE2000-1097
View Paper titled, Analysis and Design of Electrothermal Actuators Fabricated From Single Crystal Silicon
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Topics: Actuators, Crystals, Design, Silicon, Silicon-on-insulator, Deflection, Euler-Bernoulli beam theory, Heat conduction, Heating, Manganese (Metal)
Proceedings Papers

An Integrated SOI Optical Microswitch Using Electrostatic Micromirror Actuators With Insulated Touch-Down Beams and Curved Electrodes

Young-Hyun Jin, Kyoung-Sun Seo, Young-Ho Cho, Sang-Shin Lee, Ki-Chang Song, Jong-Uk Bu
Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 177-181, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1089
https://doi.org/10.1115/IMECE2000-1089
View Paper titled, An Integrated SOI Optical Microswitch Using Electrostatic Micromirror Actuators With Insulated Touch-Down Beams and Curved Electrodes
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Topics: Actuators, Electrodes, Silicon-on-insulator, Microactuators, Silicon, Waveguides, Design, Etching, Insulation, Resonance
Proceedings Papers

Tunable Bandpass Filter Based on Electrothermally and Electrostatically Actuated MEMS Arch Resonator

Amal Z. Hajjaj, Md Abdullah Al Hafiz, Mohammad I. Younis
Proc. ASME. IMECE2016, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A029, November 11–17, 2016
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2016-66700
https://doi.org/10.1115/IMECE2016-66700
View Paper titled, Tunable Bandpass Filter Based on Electrothermally and Electrostatically Actuated MEMS Arch Resonator
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Topics: Arches, Filters, Microelectromechanical systems, Resonance, Hardening, Heat, Semiconductor wafers, Shapes, Silicon-on-insulator, Stiffness
Proceedings Papers

Knudsen Thermal Force Generation at the Microscale

Andrew Strongrich, Alina Alexeenko
Proc. ASME. IMECE2014, Volume 8B: Heat Transfer and Thermal Engineering, V08BT10A043, November 14–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2014-38724
https://doi.org/10.1115/IMECE2014-38724
View Paper titled, Knudsen Thermal Force Generation at the Microscale
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Topics: Deflection, Heating, Knudsen number, Microcantilevers, Microscale devices, Microscopy, Pressure, Semiconductor wafers, Silicon, Silicon-on-insulator
Proceedings Papers

Characterization of SOI MEMS Sidewall Roughness

Leslie M. Phinney, Bonnie B. McKenzie, James A. Ohlhausen, Thomas E. Buchheit, Randy J. Shul
Proc. ASME. IMECE2011, Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration, 187-193, November 11–17, 2011
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2011-62593
https://doi.org/10.1115/IMECE2011-62593
View Paper titled, Characterization of SOI MEMS Sidewall Roughness
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Topics: Microelectromechanical systems, Silicon-on-insulator, Surface roughness, Silicon, Atomic force microscopy, Actuators, Chemical etching, Etching, Manufacturing, Polymers
Proceedings Papers

A SOI-MEMS-Based Single Axis Active Probe for Cellular Force Sensing and Cell Manipulation

Li Zhang, Jingyan Dong
Proc. ASME. IMECE2010, Volume 10: Micro and Nano Systems, 537-542, November 12–18, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2010-37924
https://doi.org/10.1115/IMECE2010-37924
View Paper titled, A SOI-MEMS-Based Single Axis Active Probe for Cellular Force Sensing and Cell Manipulation
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Topics: Microelectromechanical systems, Probes, Silicon-on-insulator, Semiconductor wafers, Damping, Design, Displacement, Manufacturing, Micromachining, Q-factor
Proceedings Papers

A Multiple-Beam Tuning-Fork Gyroscope With High Quality Factors

Ren Wang, Shiva Krishna Durgam, Zhili Hao, Linda Vahala
Proc. ASME. IMECE2009, Volume 12: Micro and Nano Systems, Parts A and B, 415-416, November 13–19, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2009-10454
https://doi.org/10.1115/IMECE2009-10454
View Paper titled, A Multiple-Beam Tuning-Fork Gyroscope With High Quality Factors
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Topics: Q-factor, Manufacturing, Design, Engineering prototypes, Semiconductor wafers, Silicon-on-insulator, Testing
Proceedings Papers

Design, Dynamics and Active Control of Micro Interferometers for Low Noise Parallel Operation

Omkar Karhade, Levent Degertekin, Thomas Kurfess
Proc. ASME. IMECE2008, Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 547-556, October 31–November 6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2008-69238
https://doi.org/10.1115/IMECE2008-69238
View Paper titled, Design, Dynamics and Active Control of Micro Interferometers for Low Noise Parallel Operation
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Topics: Design, Dynamics (Mechanics), Interferometers, Noise (Sound), Diffraction gratings, Algorithms, Noise control, Control algorithms, Micromachining, Resolution (Optics)
Proceedings Papers

Static Power Consumption: Silicon on Insulator Metal Oxide Semiconductor Field Effect Transistor

Uthaman Raju, Praveen Pandojirao-S., Niraja Sivakumar, Dereje Agonafer
Proc. ASME. IMECE2007, Volume 5: Electronics and Photonics, 177-182, November 11–15, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2007-44059
https://doi.org/10.1115/IMECE2007-44059
View Paper titled, Static Power Consumption: Silicon on Insulator Metal Oxide Semiconductor Field Effect Transistor
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Topics: Energy consumption, MOSFET transistors, Silicon-on-insulator, Leakage, Silicon, Gates (Closures), Design, Dimensions, Energy dissipation, Engineering simulation
Proceedings Papers

Enhanced Cross-Axis Rejection Capacitive Strain Gauge

Babak Jamshidi, Robert G. Azevedo, Anand V. Jog, Albert P. Pisano
Proc. ASME. IMECE2007, Volume 11: Micro and Nano Systems, Parts A and B, 535-539, November 11–15, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2007-43168
https://doi.org/10.1115/IMECE2007-43168
View Paper titled, Enhanced Cross-Axis Rejection Capacitive Strain Gauge
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Topics: Strain gages, Noise (Sound), Capacitance, Shear (Mechanics), Silicon-on-insulator, Capacitors, Deflection, Electronics, Engineering simulation, Errors
Proceedings Papers

Modeling Support Loss in SOI-Based Micromechanical Resonators

Yang Xu, Zhili Hao
Proc. ASME. IMECE2007, Volume 11: Micro and Nano Systems, Parts A and B, 85-89, November 11–15, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2007-41309
https://doi.org/10.1115/IMECE2007-41309
View Paper titled, Modeling Support Loss in SOI-Based Micromechanical Resonators
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Topics: Micromechanical resonators, Modeling, Silicon-on-insulator, Stress, Vibration, Displacement, Computer simulation, Q-factor, Semiconductor wafers
Proceedings Papers

Deep X-Ray Mask With Integrated Actuator for 3D LIGA Process

Kwang-Cheol Lee, Seung S. Lee
Proc. ASME. IMECE2002, Microelectromechanical Systems, 383-388, November 17–22, 2002
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2002-33397
https://doi.org/10.1115/IMECE2002-33397
View Paper titled, Deep X-Ray Mask With Integrated Actuator for 3D LIGA Process
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Topics: Actuators, Microactuators, Microfabrication, X-rays, Blanks, Electrodes, Electroplating, Micromachining, Reactive-ion etching, Semiconductor wafers
Proceedings Papers

Nanoscale Quantitative Thermal Imaging of Electronic Devices

Jianhua Zhou, Choongho Yu, Qing Hao, Dohyung Kim, Li Shi
Proc. ASME. IMECE2002, Heat Transfer, Volume 7, 23-29, November 17–22, 2002
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2002-32112
https://doi.org/10.1115/IMECE2002-32112
View Paper titled, Nanoscale Quantitative Thermal Imaging of Electronic Devices
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Topics: Imaging, Nanoscale phenomena, Metallic films, Probes, Thermocouples, Atomic force microscopy, Metals, Sensors, Tunnel construction, Heat conduction
Proceedings Papers

MEMS Foundry for High Volume Manufacturing and Product Reliance

David A. Koester, James P. Baumhover
Proc. ASME. IMECE2002, Microelectromechanical Systems, 535-540, November 17–22, 2002
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2002-39355
https://doi.org/10.1115/IMECE2002-39355
View Paper titled, MEMS Foundry for High Volume Manufacturing and Product Reliance
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Topics: Manufacturing, Microelectromechanical systems, Risk, Metals, Polysilicon, Product development, Product reliability, Silicon-on-insulator, Testing, Vehicles