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Proceedings Papers

Tribology on the Macro- to Nanoscales of MEMS Materials: A Review

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Bharat Bhushan
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 265-266, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1252
https://doi.org/10.1115/IMECE1998-1252
View Paper titled, Tribology on the Macro- to Nanoscales of MEMS Materials: A Review
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Topics: Microelectromechanical systems, Tribology, Friction, Silicon, Polysilicon, Microscale devices, Crystals, Wear, Boundary lubrication, Nanoindentation
Proceedings Papers

Chemical Structure Analysis of Carbon-Doped Silicon Oxide Thin Films by Plasma-Enhanced Chemical Vapor Deposition of Tetrakis(Trimethylsilyloxy)Silane Precursor

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Jacob Comeaux, William B. Wirth, Justin Courville, Lingyiqian Luo, Hui Yan, Seonhee Jang
Proc. ASME. IMECE2021, Volume 3: Advanced Materials: Design, Processing, Characterization, and Applications, V003T03A032, November 1–5, 2021
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2021-72026
https://doi.org/10.1115/IMECE2021-72026
View Paper titled, Chemical Structure Analysis of Carbon-Doped Silicon Oxide Thin Films by Plasma-Enhanced Chemical Vapor Deposition of Tetrakis(Trimethylsilyloxy)Silane Precursor
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Topics: Carbon, Plasma-enhanced chemical vapor deposition, Silicon, Thin films
Proceedings Papers

High-Temperature Electron Emission From Diamond Films

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S. H. Shin, T. S. Fisher, D. G. Walker, A. M. Strauss, W. P. Kang, J. L. Davidson
Proc. ASME. IMECE2001, Heat Transfer: Volume 4 — Combustion and Energy Systems, 361-365, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/HTD-24277
https://doi.org/10.1115/IMECE2001/HTD-24277
View Paper titled, High-Temperature Electron Emission From Diamond Films
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Topics: Diamond films, Electron emission, High temperature, Diamonds, Temperature, Electron field emission, Energy conversion, Electrons, Emissions, Energy / power systems
Proceedings Papers

Studying the Effect of N-Type Strained Silicon on the Temperature Coefficient of Resistance

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Amr A. Balbola, Mohammed O. Kayed, Walied A. Moussa
Proc. ASME. IMECE2017, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A004, November 3–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2017-70039
https://doi.org/10.1115/IMECE2017-70039
View Paper titled, Studying the Effect of N-Type Strained Silicon on the Temperature Coefficient of Resistance
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Topics: Silicon, Temperature, Stress, Plasma-enhanced chemical vapor deposition, Sensors, Atoms, Calibration, Microelectromechanical systems, Microfabrication, Silicon nitride ceramics
Proceedings Papers

Effects of Silicon Substrate on the Growth of Carbon Nanotubes

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K. P. Yung, R. Y. J. Tay, J. Wei, B. K. Tay
Proc. ASME. IMECE2009, Volume 5: Electronics and Photonics, 143-148, November 13–19, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2009-10553
https://doi.org/10.1115/IMECE2009-10553
View Paper titled, Effects of Silicon Substrate on the Growth of Carbon Nanotubes
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Topics: Carbon nanotubes, Silicon, Plasma-enhanced chemical vapor deposition, Catalysts, Electronics, Mechanical properties, Scanning electron microscopy
Proceedings Papers

Formation of Carbon Nanotube-Polymer Composites With Different Concentrations of Polystyrene Solution

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K. P. Yung, J. Wei, B. K. Tay
Proc. ASME. IMECE2008, Volume 15: Processing and Engineering Applications of Novel Materials, 181-183, October 31–November 6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2008-66912
https://doi.org/10.1115/IMECE2008-66912
View Paper titled, Formation of Carbon Nanotube-Polymer Composites With Different Concentrations of Polystyrene Solution
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Topics: Carbon, Composite materials, Nanotubes, Polymers, Carbon nanotubes, Plasma-enhanced chemical vapor deposition, Electrical conductance, Electrical conductivity, Fillers (Materials), Thermal conductivity
Proceedings Papers

Micro Thin Film Temperature Sensors Embedded in Metal Structures

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Hongseok Choi, Arindom Datta, Xiaochun Li
Proc. ASME. IMECE2004, Microelectromechanical Systems, 21-24, November 13–19, 2004
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2004-61398
https://doi.org/10.1115/IMECE2004-61398
View Paper titled, Micro Thin Film Temperature Sensors Embedded in Metal Structures
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Topics: Metalwork, Temperature sensors, Thin films, Manufacturing, Sensors, Plasma-enhanced chemical vapor deposition, Thermocouples, Calibration, Cathode rays, Electron beams
Proceedings Papers

Thermal Contact Conductance Enhancement With Carbon Nanotube Arrays

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Jun Xu, Timothy S. Fisher
Proc. ASME. IMECE2004, Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology, 559-563, November 13–19, 2004
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2004-60185
https://doi.org/10.1115/IMECE2004-60185
View Paper titled, Thermal Contact Conductance Enhancement With Carbon Nanotube Arrays
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Topics: Carbon nanotubes, Contact resistance, Electrical conductance, Heat losses, Metal foil, Multi-walled carbon nanotubes, Phase change materials, Plasma-enhanced chemical vapor deposition, Radiation (Physics), Semiconductor wafers
Proceedings Papers

Numerical Simulation of Gas Phase Growth Environment of Carbon Nanotube Synthesis by Plasma-Enhanced Chemical Vapor Deposition

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R. K. Garg, J. P. Gore, T. S. Fisher
Proc. ASME. IMECE2005, Heat Transfer, Part A, 213-220, November 5–11, 2005
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2005-81953
https://doi.org/10.1115/IMECE2005-81953
View Paper titled, Numerical Simulation of Gas Phase Growth Environment of Carbon Nanotube Synthesis by Plasma-Enhanced Chemical Vapor Deposition
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Topics: Carbon nanotubes, Computer simulation, Plasma-enhanced chemical vapor deposition, Plasmas (Ionized gases)
Proceedings Papers

A Novel Batch Production Technique of Metal Embedded Thin Film Microsensors for Applications in Manufacturing

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Arindom Datta, Hongseok Choi, Xiaochun Li
Proc. ASME. IMECE2005, Microelectromechanical Systems, 143-144, November 5–11, 2005
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2005-81211
https://doi.org/10.1115/IMECE2005-81211
View Paper titled, A Novel Batch Production Technique of Metal Embedded Thin Film Microsensors for Applications in Manufacturing
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Topics: Manufacturing, Metals, Microsensors, Thin films, Semiconductor wafers, Sensors, Strain gages, Electroplating, Nickel, Etching
Proceedings Papers

Effect of DC Bias on Microwave Plasma Enhanced Chemical Vapor Deposition Synthesis of Single-Walled Carbon Nanotubes

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Matthew R. Maschmann, Placidus B. Amama, Timothy S. Fisher
Proc. ASME. IMECE2005, Manufacturing Engineering and Materials Handling, Parts A and B, 971-974, November 5–11, 2005
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2005-79007
https://doi.org/10.1115/IMECE2005-79007
View Paper titled, Effect of DC Bias on Microwave Plasma Enhanced Chemical Vapor Deposition Synthesis of Single-Walled Carbon Nanotubes
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Topics: Microwaves, Plasma-enhanced chemical vapor deposition, Single-walled carbon nanotubes, Carbon nanotubes, Chirality, Electron microscopy, Manufacturing, Nanoscale phenomena, Nanotubes, Raman spectroscopy
Proceedings Papers

A Nanoindentation-Based Microbridge Testing Method for Mechanical Characterization of Thin Films for MEMS Applications

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Zhiqiang Cao, Tong-Yi Zhang, Xin Zhang
Proc. ASME. IMECE2005, Microelectromechanical Systems, 221-228, November 5–11, 2005
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2005-80288
https://doi.org/10.1115/IMECE2005-80288
View Paper titled, A Nanoindentation-Based Microbridge Testing Method for Mechanical Characterization of Thin Films for MEMS Applications
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Topics: Microelectromechanical systems, Nanoindentation, Testing, Thin films, Plasma-enhanced chemical vapor deposition, Stress, Young's modulus, Residual stresses, Deflection, Deformation
Proceedings Papers

The Effects of Process Parameters on Carbon Nanotube Synthesis by Plasma Enhanced Chemical Vapor Deposition (PECVD)

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Sungwon S. Kim, Timothy S. Fisher
Proc. ASME. IMECE2005, Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology, 575-580, November 5–11, 2005
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2005-81431
https://doi.org/10.1115/IMECE2005-81431
View Paper titled, The Effects of Process Parameters on Carbon Nanotube Synthesis by Plasma Enhanced Chemical Vapor Deposition (PECVD)
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Topics: Carbon nanotubes, Plasma-enhanced chemical vapor deposition, Carbon, Bonding, Catalysts, Film thickness, Flow (Dynamics), Methane, Microwaves, Nanostructures