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Proceedings Papers

Comparison of Electrode Configuration for (0,2) Piezoelectric Micromachined Ultrasound Transducer

Abdul Q. Popal, Ranjith D. Janardhana, Fazli Akram, Nathan Jackson
Proc. ASME. IMECE2024, Volume 10: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging, V010T13A005, November 17–21, 2024
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2024-145319
https://doi.org/10.1115/IMECE2024-145319
View Paper titled, Comparison of Electrode Configuration for (0,2) Piezoelectric Micromachined Ultrasound Transducer
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Topics: Electrodes, Finite element methods, Micromachining, Ultrasonic transducers
Proceedings Papers

Development of Mesoscale Actuation Device

Jinghui Zhu, Donny Wang, Chang-Jin Kim, Greg P. Carman
Proc. ASME. IMECE96, Aerospace, 649-654, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0679
https://doi.org/10.1115/IMECE1996-0679
View Paper titled, Development of Mesoscale Actuation Device
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Topics: Actuators, Bearings, Displacement, Machining, Manufacturing, Microelectromechanical systems, Micromachining, Microscale devices, Microscopes, Semiconductor wafers
Proceedings Papers

Ultrasonic MEMS Device for Fluid Pumping and Mixing

Richard M. White
Proc. ASME. IMECE96, Aerospace, 743-750, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0690
https://doi.org/10.1115/IMECE1996-0690
View Paper titled, Ultrasonic MEMS Device for Fluid Pumping and Mixing
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Topics: Fluids, Microelectromechanical systems, Membranes, Pumps, Waves, Acoustic intensity, Acoustics, Gases, Micromachining, Silicon
Proceedings Papers

Control of Roll Moment by MEMS

Gwo-Bin Lee, Chin-Ming Ho, Fukang Jiang, Chang Liu, Tom Tsao, Yu-Chong Tai, Fabien Scheuer
Proc. ASME. IMECE96, Aerospace, 797-803, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0696
https://doi.org/10.1115/IMECE1996-0696
View Paper titled, Control of Roll Moment by MEMS
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Topics: Actuators, Boundary layers, Flow (Dynamics), Flow instability, Microactuators, Microelectromechanical systems, Micromachining, Separation (Technology), Torque, Vortices
Proceedings Papers

Silicon Bulk Micromachining in Tohoku University

Kazuyuki Minami, Masayoshi Esashi
Proc. ASME. IMECE96, Aerospace, 769-775, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0693
https://doi.org/10.1115/IMECE1996-0693
View Paper titled, Silicon Bulk Micromachining in Tohoku University
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Topics: Micromachining, Silicon, Microelectromechanical systems, Sensors, Blood vessels, Catheters, Electric fields, Evaporation, Inertia (Mechanics), Manufacturing
Proceedings Papers

Micro-Electro-Mechanical-Systems and Industrial Applications

Manfred Möllendorf
Proc. ASME. IMECE96, Aerospace, 761-767, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0692
https://doi.org/10.1115/IMECE1996-0692
View Paper titled, Micro-Electro-Mechanical-Systems and Industrial Applications
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Topics: Microelectromechanical systems, Micromachining, Pressure sensors, Sensors
Proceedings Papers

Multi-Level Polysilicon Surface-Micromachining Technology: Applications and Issues

Jeffry J. Sniegowski
Proc. ASME. IMECE96, Aerospace, 751-759, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0691
https://doi.org/10.1115/IMECE1996-0691
View Paper titled, Multi-Level Polysilicon Surface-Micromachining Technology: Applications and Issues
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Topics: Micromachining, Polysilicon, Manufacturing, Microelectromechanical systems, Circuits, Etching, Polishing, Semiconductor wafers
Proceedings Papers

Design Techniques for Minimizing Manufacturing Variations in Surface Micromachined Accelerometers

Stephen F. Bart, Howard R. Samuels
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 427-433, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1385
https://doi.org/10.1115/IMECE1996-1385
View Paper titled, Design Techniques for Minimizing Manufacturing Variations in Surface Micromachined Accelerometers
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Topics: Accelerometers, Engineering design processes, Manufacturing, Micromachining, Etching, Capacitors, Design, Dimensions, Geometry, Sensors
Proceedings Papers

Nonlinear Dynamics of Micromachined Rate Gyros

Per B. Ljung, Albert P. Pisano
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 393-400, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1380
https://doi.org/10.1115/IMECE1996-1380
View Paper titled, Nonlinear Dynamics of Micromachined Rate Gyros
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Topics: Micromachining, Nonlinear dynamics, Design, Nonlinear equations, Resonance
Proceedings Papers

Sequential Solutions of Field Equations Using a Single BEM Model

Per B. Ljung
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 409-415, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1382
https://doi.org/10.1115/IMECE1996-1382
View Paper titled, Sequential Solutions of Field Equations Using a Single BEM Model
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Topics: Boundary element methods, Computer software, Computer-aided design, Computers, Differential equations, Matlab, Micromachining
Proceedings Papers

A Bimetallic Thermally Actuated Micropump

Yue Yang, Zhaoying Zhou, Xiongying Ye, Xiaoning Jiang
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 351-354, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1373
https://doi.org/10.1115/IMECE1996-1373
View Paper titled, A Bimetallic Thermally Actuated Micropump
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Topics: Micropumps, Pumps, Flow (Dynamics), Actuators, Membranes, Micromachining, Silicon, Valves
Proceedings Papers

A Technique for Determining the Poisson’s Ratio of Thin Films

Peter Krulevitch
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 319-323, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1368
https://doi.org/10.1115/IMECE1996-1368
View Paper titled, A Technique for Determining the Poisson’s Ratio of Thin Films
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Topics: Poisson ratio, Thin films, Plates (structures), Stress, Calibration, Cantilever beams, Errors, Micromachining
Proceedings Papers

Quasi-LIGA Technology for Micromachined Gyroscopes

Mengnian Niu, Shubo Wang, Xiaodong Wang, Jianfang Xie, Weiyuan Wang
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 355-360, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1374
https://doi.org/10.1115/IMECE1996-1374
View Paper titled, Quasi-LIGA Technology for Micromachined Gyroscopes
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Topics: Micromachining, Dimensions, Finite element methods, Microgyroscopes, Resonance, Temperature
Proceedings Papers

Development of a Micropump for Microelectronic Cooling

C. Channy Wong, Douglas R. Adkins, Dahwey Chu
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 239-244, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1357
https://doi.org/10.1115/IMECE1996-1357
View Paper titled, Development of a Micropump for Microelectronic Cooling
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Topics: Cooling, Micropumps, Design, Pumps, Silicon, Microelectromechanical systems, Electrodes, Electrohydrodynamics, Fluids, Manufacturing
Proceedings Papers

Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process

Jong Hyun Lee, Kyung Ho Park, Chun Su Lee, Jong Tae Baek, Chang-Jin Kim, Hyung Joun Yoo
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 373-377, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1377
https://doi.org/10.1115/IMECE1996-1377
View Paper titled, Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process
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Topics: Etching, Manufacturing, Microactuators, Micromachining, Polysilicon, Chemical etching, Stiction, Stress, Thin films, Vapors
Proceedings Papers

Micro Manipulation Based on Micro Physics: Micro Pyramids on Endeffector Surface for Attractive Force Reduction

Fumihito Arai, Daisuke Andou, Yukio Nonoda, Toshio Fukuda
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 367-372, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1376
https://doi.org/10.1115/IMECE1996-1376
View Paper titled, Micro Manipulation Based on Micro Physics: Micro Pyramids on Endeffector Surface for Attractive Force Reduction
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Topics: Micromanipulation, Physics, Adhesives, Van der Waals forces, Grippers, Engineering prototypes, Machinery, Maintenance, Micromachining, Surface roughness
Proceedings Papers

Design and Fabrication of the Fundamental Components Integrated to Realize a Functional Silicon Micromachined Gas Chromatography System

Edward S. Kolesar, Rocky R. Reston
Proc. ASME. IMECE96, Engineering Systems, 11-17, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0869
https://doi.org/10.1115/IMECE1996-0869
View Paper titled, Design and Fabrication of the Fundamental Components Integrated to Realize a Functional Silicon Micromachined Gas Chromatography System
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Topics: Design, Gas chromatography, Manufacturing, Micromachining, Silicon, Nitrogen, Sensors, Circuits, Ejectors, Borosilicate glasses
Proceedings Papers

Projection Micromachining of Polyimide Thin Films by an Excimer Laser

X. Zhang, C. P. Grigoropoulos, D. J. Krajnovich, A. C. Tam
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 45-54, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1029
https://doi.org/10.1115/IMECE1996-1029
View Paper titled, Projection Micromachining of Polyimide Thin Films by an Excimer Laser
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Topics: Excimer lasers, Micromachining, Thin films, Etching, Ablation (Vaporization technology), Lasers, Atomic force microscopy, Fluence (Radiation measurement), Resolution (Optics), Absorption
Proceedings Papers

A Triangular Frequency-Tuning Comb Array

Ki Bang Lee, Young-Ho Cho
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 127-131, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-0950
https://doi.org/10.1115/IMECE1997-0950
View Paper titled, A Triangular Frequency-Tuning Comb Array
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Topics: Damping, Manufacturing, Microfabrication, Micromachining, Micromechanical resonators, Pressure, Resonance, Shapes
Proceedings Papers

Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates

Zhimin J. Yao, Chuck Goldsmith, Susan Eshelman, David Denniston
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 69-73, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-0941
https://doi.org/10.1115/IMECE1997-0941
View Paper titled, Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates
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Topics: Cantilevers, Design, Electrical resistivity, Manufacturing, Membranes, Metals, Micromachining, Microwaves, Signals, Silicon