1-20 of 160
Microfabrication
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Development of a Six-Component Miniature Force Sensor for Robotic Applications

W. L. Jin, C. D. Mote, Jr.
Proc. ASME. IMECE96, Dynamic Systems and Control, 753-760, November 17–22, 1996
Paper No: IMECE1996-0407
https://doi.org/10.1115/IMECE1996-0407
View Paper titled, Development of a Six-Component Miniature Force Sensor for Robotic Applications
Open the PDF for Development of a Six-Component Miniature Force Sensor for Robotic Applications in another window
Topics: Force sensors, Robotics, Design, Machining, Microfabrication, Silicon, Stiffness
Proceedings Papers

Optimal Design of a Microfabricated Diffusion-Based Extraction Device

Mark R. Holl, Paul Galambos, Fred K. Forster, James P. Brody, Paul Yager
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 189-195, November 17–22, 1996
Paper No: IMECE1996-1352
https://doi.org/10.1115/IMECE1996-1352
View Paper titled, Optimal Design of a Microfabricated Diffusion-Based Extraction Device
Open the PDF for Optimal Design of a Microfabricated Diffusion-Based Extraction Device in another window
Topics: Design, Diffusion (Physics), Microfabrication, Microchannels, Equilibrium (Physics), Flow (Dynamics), Assaying, Blood, Fluid dynamics, Fluids
Proceedings Papers

Experiments and Simulations on a Micro-Mixer Fabricated Using a Planar Silicon/Glass Technology

Jens Peter Krog, Jens Branebjerg, Claus Rye Nielsen, Peter Gravesen
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 177-182, November 17–22, 1996
Paper No: IMECE1996-1350
https://doi.org/10.1115/IMECE1996-1350
View Paper titled, Experiments and Simulations on a Micro-Mixer Fabricated Using a Planar Silicon/Glass Technology
Open the PDF for Experiments and Simulations on a Micro-Mixer Fabricated Using a Planar Silicon/Glass Technology in another window
Topics: Engineering simulation, Glass, Silicon, Simulation, Flow (Dynamics), Computer simulation, Design, Diffusion (Physics), Experimental characterization, Fluids
Proceedings Papers

Measurement of Mechanical Properties of Electroplated Nickel-Iron Alloys

Charles C. Chung, Mark G. Allen
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 453-457, November 17–22, 1996
Paper No: IMECE1996-1389
https://doi.org/10.1115/IMECE1996-1389
View Paper titled, Measurement of Mechanical Properties of Electroplated Nickel-Iron Alloys
Open the PDF for Measurement of Mechanical Properties of Electroplated Nickel-Iron Alloys in another window
Topics: Alloys, Iron, Mechanical properties, Nickel, Shear modulus, Microfabrication, Young's modulus
Proceedings Papers

A Bond Graph Model for the Sample Extraction / Injection System of a Micro-Sized Gas Chromatographic Instrument

Jie Lin, Wanjun Wang, Michael C. Murphy, Edward Overton
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 205-219, November 17–22, 1996
Paper No: IMECE1996-1354
https://doi.org/10.1115/IMECE1996-1354
View Paper titled, A Bond Graph Model for the Sample Extraction / Injection System of a Micro-Sized Gas Chromatographic Instrument
Open the PDF for A Bond Graph Model for the Sample Extraction / Injection System of a Micro-Sized Gas Chromatographic Instrument in another window
Topics: Instrumentation, Fluids, Dimensions, Engineering prototypes, Microfabrication, Microscale devices, Modeling, Portable instruments, Sensors, Simulation results
Proceedings Papers

Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology

R. Ghodssi, D. J. Beebe, V. White, D. D. Denton
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 379-386, November 17–22, 1996
Paper No: IMECE1996-1378
https://doi.org/10.1115/IMECE1996-1378
View Paper titled, Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology
Open the PDF for Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology in another window
Topics: Microactuators, Microelectromechanical systems, Skin, Design, Electroplating, Lithography, Manganese (Metal), Microfabrication, Microscale devices, Molding
Proceedings Papers

Microflow System and Noncontact Transportation of DNA Molecule in Microflow Channels by Dielectrophoretic Force

Keisuke Morishima, Toshio Fukuda, Fumihito Arai, Kenichi Yoshikawa
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 339-344, November 17–22, 1996
Paper No: IMECE1996-1371
https://doi.org/10.1115/IMECE1996-1371
View Paper titled, Microflow System and Noncontact Transportation of DNA Molecule in Microflow Channels by Dielectrophoretic Force
Open the PDF for Microflow System and Noncontact Transportation of DNA Molecule in Microflow Channels by Dielectrophoretic Force in another window
Topics: DNA, Transportation systems, Flow (Dynamics), Electrodes, Design, Electric fields, Fluorescence, Microfabrication, Microscopy
Proceedings Papers

Barbed Microneedle Design to Enhance Penetration and Retraction Forces Using Finite Element Modelling

Ranjith D. Janardhana, Mateus Cabanlong, Pavan Muttil, Nathan Jackson
Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A006, October 30–November 3, 2022
Paper No: IMECE2022-95590
https://doi.org/10.1115/IMECE2022-95590
View Paper titled, Barbed Microneedle Design to Enhance Penetration and Retraction Forces Using Finite Element Modelling
Open the PDF for Barbed Microneedle Design to Enhance Penetration and Retraction Forces Using Finite Element Modelling in another window
Topics: Design, Finite element analysis, Microfabrication, Microneedles, Modeling
Proceedings Papers

Effect of SF 6 and C 4 F 8 Flow Rate on Etched Surface Profile and Grass Formation in Deep Reactive Ion Etching Process

Pallavi Sharma, Matthias Pleil, Nathan Jackson
Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A012, October 30–November 3, 2022
Paper No: IMECE2022-92967
https://doi.org/10.1115/IMECE2022-92967
View Paper titled, Effect of SF 6 and C 4 F 8 Flow Rate on Etched Surface Profile and Grass Formation in Deep Reactive Ion Etching Process
Open the PDF for Effect of SF 6 and C 4 F 8 Flow Rate on Etched Surface Profile and Grass Formation in Deep Reactive Ion Etching Process in another window
Topics: Etching, Flow (Dynamics), Reactive-ion etching, Silicon, Cooling, Cycles, Corners (Structural elements), Energy dissipation, Gas flow, Heat
Proceedings Papers

A Triangular Frequency-Tuning Comb Array

Ki Bang Lee, Young-Ho Cho
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 127-131, November 16–21, 1997
Paper No: IMECE1997-0950
https://doi.org/10.1115/IMECE1997-0950
View Paper titled, A Triangular Frequency-Tuning Comb Array
Open the PDF for A Triangular Frequency-Tuning Comb Array in another window
Topics: Damping, Manufacturing, Microfabrication, Micromachining, Micromechanical resonators, Pressure, Resonance, Shapes
Proceedings Papers

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

C. H. Liu, J. K. Reynolds, A. Partridge, J. D. Grade, A. M. Barzilai, T. W. Kenny, H. K. Rockstad
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 13-20, November 16–21, 1997
Paper No: IMECE1997-0932
https://doi.org/10.1115/IMECE1997-0932
View Paper titled, A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers
Open the PDF for A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers in another window
Topics: Accelerometers, Electrons, Micromachining, Transducers, Tunnel construction, Resonance, Silicon, Acoustics, Design, Manufacturing
Proceedings Papers

Design, Fabrication and Static Test of a Resonant Microaccelerometer

Si Young Kim, Jeung Sang Go, Young-Ho Cho
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 21-26, November 16–21, 1997
Paper No: IMECE1997-0933
https://doi.org/10.1115/IMECE1997-0933
View Paper titled, Design, Fabrication and Static Test of a Resonant Microaccelerometer
Open the PDF for Design, Fabrication and Static Test of a Resonant Microaccelerometer in another window
Topics: Design, Manufacturing, Resonance, Accelerometers, Micromachining, Polysilicon, Stress, Annealing, Deflection, Mechanical structures
Proceedings Papers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Sumit Majumder, N. E. McGruer, Paul M. Zavracky, Richard H. Morrison, George G. Adams, Jacqueline Krim
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 341-346, November 15–20, 1998
Paper No: IMECE1998-1265
https://doi.org/10.1115/IMECE1998-1265
View Paper titled, Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch
Open the PDF for Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch in another window
Topics: Contact resistance, Modeling, Switches, Gates (Closures), Cantilever beams, Coating processes, Coatings, Currents, Cycles, Electrodes
Proceedings Papers

Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass

Jong Soo Ko, Young-Ho Cho, Byung Man Kwak, Kwanhum Park
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 353-356, November 15–20, 1998
Paper No: IMECE1998-1267
https://doi.org/10.1115/IMECE1998-1267
View Paper titled, Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass
Open the PDF for Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass in another window
Topics: Cantilevers, Design, Manufacturing, Accelerometers, Microfabrication, Cantilever beams, Mass production, Resonance, Sawing, Semiconductor wafers
Proceedings Papers

Modification of Golay’s Theory for Rectangular Microfabricated Gas Chromatographic Columns

Glenn E. Spangler
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 215-222, November 15–20, 1998
Paper No: IMECE1998-1245
https://doi.org/10.1115/IMECE1998-1245
View Paper titled, Modification of Golay’s Theory for Rectangular Microfabricated Gas Chromatographic Columns
Open the PDF for Modification of Golay’s Theory for Rectangular Microfabricated Gas Chromatographic Columns in another window
Topics: Microfabrication, Diffusion (Physics), Flow (Dynamics), Gas chromatography, Pressure, Resolution (Optics)
Proceedings Papers

Microfluidics of a Planar Microfabricated Fluid Filter

Yit-shun Leung Ki, Didier Maillefer, Gilles Rey-Mermet, Peter A. Monkewitz, Philippe Renaud, Harald T. G. van Lintel
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 165-170, November 15–20, 1998
Paper No: IMECE1998-1238
https://doi.org/10.1115/IMECE1998-1238
View Paper titled, Microfluidics of a Planar Microfabricated Fluid Filter
Open the PDF for Microfluidics of a Planar Microfabricated Fluid Filter in another window
Topics: Filters, Fluids, Microfabrication, Microfluidics, Design, Filtration, Flow (Dynamics), Micromachining, Pumps, Silicon
Proceedings Papers

Collection of Airborne Bacteria With Micro-Machined Virtual Impactor Arrays

Vanessa M. Kenning, Charles J. Call, Patrick T. Call, Joseph G. Birmingham
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 111-116, November 15–20, 1998
Paper No: IMECE1998-1230
https://doi.org/10.1115/IMECE1998-1230
View Paper titled, Collection of Airborne Bacteria With Micro-Machined Virtual Impactor Arrays
Open the PDF for Collection of Airborne Bacteria With Micro-Machined Virtual Impactor Arrays in another window
Topics: Bacteria, Micromachining, Particulate matter, Flow (Dynamics), Surface roughness, Turbulence, Computational fluid dynamics, Design, Engineering simulation, Inertia (Mechanics)
Proceedings Papers

Artificial Micropatterns of Cells on Biocompatible Surfaces

Albert Folch, Mehmet Toner
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 27-30, November 15–20, 1998
Paper No: IMECE1998-1219
https://doi.org/10.1115/IMECE1998-1219
View Paper titled, Artificial Micropatterns of Cells on Biocompatible Surfaces
Open the PDF for Artificial Micropatterns of Cells on Biocompatible Surfaces in another window
Topics: Biocompatibility, Silicon, Adhesion, Assaying, Biological tissues, Biosensors, Microfabrication, Microscale devices, Polymers, Self-assembly
Proceedings Papers

Multi-Chamber, Real-Time DNA Analysis in the Field Using Microfabricated Silicon Chambers

P. Belgrader, W. Benett, R. Frattaroli, D. Hadley, R. Langlois, S. Lehew, R. Mariella, Jr., F. Milanovich, S. Nasarabadi, M. A. Northrup, J. Richards, P. Stratton, K. S. Venkateswaran, G. Long, W. Nelson
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 279-283, November 15–20, 1998
Paper No: IMECE1998-1255
https://doi.org/10.1115/IMECE1998-1255
View Paper titled, Multi-Chamber, Real-Time DNA Analysis in the Field Using Microfabricated Silicon Chambers
Open the PDF for Multi-Chamber, Real-Time DNA Analysis in the Field Using Microfabricated Silicon Chambers in another window
Topics: DNA, Microfabrication, Silicon, Emissions, Probes, Chain, Computer software, Cooling, Cycles, Design
Proceedings Papers

Fluid Transport Mechanisms in Microfluidic Devices

Joshua I. Molho, Amy E. Herr, Thomas W. Kenny, M. Godfrey Mungal, Manish Deshpande, John R. Gilbert, Michael G. Garguilo, Phillip H. Paul, Pamela M. St. John, Timothy M. Woudenberg, Charles Connell
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 69-76, November 15–20, 1998
Paper No: IMECE1998-1224
https://doi.org/10.1115/IMECE1998-1224
View Paper titled, Fluid Transport Mechanisms in Microfluidic Devices
Open the PDF for Fluid Transport Mechanisms in Microfluidic Devices in another window
Topics: Fluids, Microfluidics, Flow (Dynamics), Pressure gradient, Electrokinetics, Imaging, Microfabrication, Pressure