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Proceedings Papers

Infrared Imaging Using Microcantilevers

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Patrick I. Oden, Panos G. Datskos, Thomas G. Thundat, Eric A. Wachter, Robert J. Warmack
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 67-75, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1338
https://doi.org/10.1115/IMECE1996-1338
View Paper titled, Infrared Imaging Using Microcantilevers
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Topics: Infrared imaging, Microcantilevers, Sensors, Deflection, Lasers, Cantilevers, Coating processes, Coatings, Noise (Sound), Radiation (Physics)
Proceedings Papers

Infrared Photodetection in the Picowatt Range Using Uncooled Micromechanical Sensors

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J. Lai, T. Perazzo, Z. Shi, A. Majumdar
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 55-59, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1336
https://doi.org/10.1115/IMECE1996-1336
View Paper titled, Infrared Photodetection in the Picowatt Range Using Uncooled Micromechanical Sensors
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Topics: Cantilevers, Density, Microcantilevers, Noise (Sound), Radiation (Physics), Resolution (Optics), Sensors, Temperature, White noise
Proceedings Papers

Study on Vibrational Damping of Microcantilevers

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Hiroshi Hosaka, Kiyoshi Itao
Proc. ASME. IMECE96, 7th International Symposium on Information Storage and Processing Systems, 123-130, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1074
https://doi.org/10.1115/IMECE1996-1074
View Paper titled, Study on Vibrational Damping of Microcantilevers
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Topics: Damping, Microcantilevers, Air flow, Cantilevers, Design, Design engineering, Internal friction, Micromechanical devices, Navier-Stokes equations, Vibrational modes
Proceedings Papers

Numerical Simulation of Radiant Thermal Processing of Bilayer Microcantilevers

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Haruna Tada, Ioannis N. Miaoulis, Peter Y. Wong
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 37-44, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-1221
https://doi.org/10.1115/IMECE1998-1221
View Paper titled, Numerical Simulation of Radiant Thermal Processing of Bilayer Microcantilevers
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Topics: Computer simulation, Microcantilevers, Semiconductor wafers, Etching, Temperature gradient, Emissivity, Separation (Technology), Temperature, Thin films, Design
Proceedings Papers

Theoretical and Experimental Analysis of Coupled Vibration of a Microcantilever Array

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Hiroshi Hosaka, Kiyoshi Itao
Proc. ASME. IMECE99, Dynamic Systems and Control, 149-156, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0020
https://doi.org/10.1115/IMECE1999-0020
View Paper titled, Theoretical and Experimental Analysis of Coupled Vibration of a Microcantilever Array
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Topics: Experimental analysis, Microcantilevers, Vibration, Damping, Air flow, Cantilevers, Internal friction, Microactuators, Resonance, Sensors
Proceedings Papers

Nanosecond Laser Experiments of Microstructure Adhesion Reduction

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James W. Rogers, Leslie M. Phinney
Proc. ASME. IMECE99, Heat Transfer: Volume 3, 25-30, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-1059
https://doi.org/10.1115/IMECE1999-1059
View Paper titled, Nanosecond Laser Experiments of Microstructure Adhesion Reduction
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Topics: Adhesion, Lasers, Microcantilevers, Stiction, Cantilevers, Fluence (Radiation measurement), Nd-YAG lasers, Polysilicon
Proceedings Papers

Development of a Program for Predicting Residual Stress Distribution in Multi-Stacked Film

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Hyeon Chang Choi, Jun Hyub Park, Yong Soo Park
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 311-317, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23845
https://doi.org/10.1115/IMECE2001/MEMS-23845
View Paper titled, Development of a Program for Predicting Residual Stress Distribution in Multi-Stacked Film
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Topics: Microelectromechanical systems, Stress concentration, Finite element methods, Semiconductor wafers, Deflection, Stress, Cantilever beams, Finite element analysis, Microcantilevers, Micromachining
Proceedings Papers

A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers

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James W. Rogers, Thomas J. Mackin, Leslie M. Phinney
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 157-165, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23823
https://doi.org/10.1115/IMECE2001/MEMS-23823
View Paper titled, A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers
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Topics: Adhesion, Microcantilevers, Microelectromechanical systems, Thermomechanics, Lasers, Fracture (Materials), Irradiation (Radiation exposure), Stiction, Fracture mechanics, Heating
Proceedings Papers

Multiplexed Detection of Nanoscale Microcantilever Deflections for High-Throughput Biomolecular Analysis

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Chris Dames, Guanghua Wu, Henry Lin, Aran Majumdar
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 123-130, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23818
https://doi.org/10.1115/IMECE2001/MEMS-23818
View Paper titled, Multiplexed Detection of Nanoscale Microcantilever Deflections for High-Throughput Biomolecular Analysis
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Topics: Deflection, Microcantilevers, Microelectromechanical systems, Nanoscale phenomena, Stress
Proceedings Papers

Design and Fabrication of an Optomechanical Uncooled Infrared Imaging System

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Y. Zhao, J. Yamaguchi, J. Choi, S. Morales, R. Horowitz, A. Majumdar, P. Norton, J. Kitching, H. Li, M. Athavale
Proc. ASME. IMECE2001, Heat Transfer: Volume 1 — Fundamentals of Heat Transfer, 367-370, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/HTD-24142
https://doi.org/10.1115/IMECE2001/HTD-24142
View Paper titled, Design and Fabrication of an Optomechanical Uncooled Infrared Imaging System
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Topics: Design, Infrared imaging, Manufacturing, Cantilevers, Temperature, Microfabrication, Absorption, Deformation, Lasers, Microcantilevers
Proceedings Papers

Nonlinear Sensitivity Analysis of Twin Non-Symmetric Micro-Cantilever Beams

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M. Amin Changizi, Ion Stiharu, Peyman Hajheidari, Davut Erdem Sahin
Proc. ASME. IMECE2017, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A014, November 3–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2017-71070
https://doi.org/10.1115/IMECE2017-71070
View Paper titled, Nonlinear Sensitivity Analysis of Twin Non-Symmetric Micro-Cantilever Beams
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Topics: Microcantilevers, Sensitivity analysis, Stiffness, Viscosity, Manufacturing, Dynamic response, Microelectromechanical systems, Cantilever beams, Computer software, Dampers
Proceedings Papers

MEMS Wind Speed Sensor: Large Deflection of Curved Micro-Cantilever Beam Under Uniform Horizontal Force

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M. Amin Changizi, Ali Abolfathi, Ion Stiharu
Proc. ASME. IMECE2015, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A008, November 13–19, 2015
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2015-50560
https://doi.org/10.1115/IMECE2015-50560
View Paper titled, MEMS Wind Speed Sensor: Large Deflection of Curved Micro-Cantilever Beam Under Uniform Horizontal Force
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Topics: Deflection, Microcantilevers, Microelectromechanical systems, Sensors, Wind velocity, Differential equations, Dimensions, Integral equations, Pressure, Wind
Proceedings Papers

Intermittent Contact Dynamics of a Micro-Cantilever in High Speed Contact Mode Scanning Probe Microscopy

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Somnath Dey, V. Kartik
Proc. ASME. IMECE2015, Volume 4A: Dynamics, Vibration, and Control, V04AT04A030, November 13–19, 2015
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2015-52367
https://doi.org/10.1115/IMECE2015-52367
View Paper titled, Intermittent Contact Dynamics of a Micro-Cantilever in High Speed Contact Mode Scanning Probe Microscopy
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Topics: Contact dynamics, Microcantilevers, Scanning probe microscopy, Cantilevers, Deflection, Imaging, Resolution (Optics), Lasers, Modeling, Spectra (Spectroscopy)
Proceedings Papers

Measurement of Thermal Conduction Through Polymeric Nanowires With the Dual Cantilever Technique

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Carlo Canetta, Arvind Narayanaswamy
Proc. ASME. IMECE2014, Volume 8B: Heat Transfer and Thermal Engineering, V08BT10A050, November 14–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2014-38233
https://doi.org/10.1115/IMECE2014-38233
View Paper titled, Measurement of Thermal Conduction Through Polymeric Nanowires With the Dual Cantilever Technique
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Topics: Cantilevers, Heat conduction, Nanowires, Electrical conductance, Thermal conductivity, Lasers, Microcantilevers, Resolution (Optics), Electrospinning, Flow (Dynamics)
Proceedings Papers

Knudsen Thermal Force Generation at the Microscale

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Andrew Strongrich, Alina Alexeenko
Proc. ASME. IMECE2014, Volume 8B: Heat Transfer and Thermal Engineering, V08BT10A043, November 14–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2014-38724
https://doi.org/10.1115/IMECE2014-38724
View Paper titled, Knudsen Thermal Force Generation at the Microscale
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Topics: Deflection, Heating, Knudsen number, Microcantilevers, Microscale devices, Microscopy, Pressure, Semiconductor wafers, Silicon, Silicon-on-insulator
Proceedings Papers

A Complete Parametric Study of Pull-In Voltage by Nonlinear Differential Equation

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M. Amin Changizi, Ion Stiharu
Proc. ASME. IMECE2014, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A026, November 14–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2014-37744
https://doi.org/10.1115/IMECE2014-37744
View Paper titled, A Complete Parametric Study of Pull-In Voltage by Nonlinear Differential Equation
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Topics: Nonlinear differential equations, Microcantilevers, Stiffness, Deflection, Dynamics (Mechanics), Electric fields, Microelectromechanical systems, Algorithms, Cantilevers, Damping
Proceedings Papers

A Novel MEMS Based Immunosensor for Ebola Virus Detection

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Adarsh Venkataraman Ganesan
Proc. ASME. IMECE2013, Volume 7B: Fluids Engineering Systems and Technologies, V07BT08A074, November 15–21, 2013
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2013-66025
https://doi.org/10.1115/IMECE2013-66025
View Paper titled, A Novel MEMS Based Immunosensor for Ebola Virus Detection
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Topics: Blood, Design, Microcantilevers, Microelectromechanical systems, Microfluidics
Proceedings Papers

DSMC Simulations of Squeeze Film Under a Harmonically Oscillating Micro RF Switch With Large Tip Displacements

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Nadim A. Diab, Issam A. Lakkis
Proc. ASME. IMECE2012, Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 187-197, November 9–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2012-88422
https://doi.org/10.1115/IMECE2012-88422
View Paper titled, DSMC Simulations of Squeeze Film Under a Harmonically Oscillating Micro RF Switch With Large Tip Displacements
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Topics: Simulation, Switches, Deflection, Dynamics (Mechanics), Microbeams, Compressibility, Convection, Equilibrium (Physics), Flow (Dynamics), Fluids
Proceedings Papers

Static Pull-In Analysis of Micro-Cantilevers in Wet Etching Fabrication Process

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Ali Darvishian, Hamid Moeenfard, Mohammad Taghi Ahmadian
Proc. ASME. IMECE2012, Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 347-350, November 9–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2012-89237
https://doi.org/10.1115/IMECE2012-89237
View Paper titled, Static Pull-In Analysis of Micro-Cantilevers in Wet Etching Fabrication Process
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Topics: Chemical etching, Manufacturing, Microcantilevers
Proceedings Papers

Micro-Cantilever Biochemical Sensing Based on Robust Finite-Horizon Non-Linear Estimation

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Xin Wang, Edwin E. Yaz, Isabelle Dufour, Susan C. Schneider
Proc. ASME. IMECE2012, Volume 4: Dynamics, Control and Uncertainty, Parts A and B, 639-646, November 9–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2012-86960
https://doi.org/10.1115/IMECE2012-86960
View Paper titled, Micro-Cantilever Biochemical Sensing Based on Robust Finite-Horizon Non-Linear Estimation
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Topics: Microcantilevers, Nonlinear estimation, Fluids, Oscillating frequencies, Rheology, Density, Fluid measurement, Microelectromechanical systems, Resonance, Rheometers