1-20 of 100
Lithography
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Development of a Microfluidic Device for Larval Zebrafish Culture to Understand the Connection Between Microbiome and Neurological Disease

Available to Purchase

Tushar Nath, Hua Tan, Allison Coffin, Seth Rudman
Proc. ASME. IMECE2024, Volume 10: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging, V010T13A014, November 17–21, 2024
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2024-145188
https://doi.org/10.1115/IMECE2024-145188
View Paper titled, Development of a Microfluidic Device for Larval Zebrafish Culture to Understand the Connection Between Microbiome and Neurological Disease
Open the PDF for Development of a Microfluidic Device for Larval Zebrafish Culture to Understand the Connection Between Microbiome and Neurological Disease in another window
Topics: Diseases, Lithography, Microfluidics, Nervous system, Plasmas (Ionized gases), Polydimethylsiloxane, Manufacturing, Biomedicine, Design, Physiology
Proceedings Papers

Fabrication of Ultra-High Aspect Ratio Array Structures Using Spontaneous Evolution in Multiport Lifted Hele-Shaw Cell

Available to Purchase

Makrand A. Rakshe, Prasanna S. Gandhi
Proc. ASME. IMECE2023, Volume 3: Advanced Manufacturing, V003T03A094, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-113267
https://doi.org/10.1115/IMECE2023-113267
View Paper titled, Fabrication of Ultra-High Aspect Ratio Array Structures Using Spontaneous Evolution in Multiport Lifted Hele-Shaw Cell
Open the PDF for Fabrication of Ultra-High Aspect Ratio Array Structures Using Spontaneous Evolution in Multiport Lifted Hele-Shaw Cell in another window
Topics: Biomedicine, Honeycomb structures, Manufacturing, Fluids, Polymer solutions, Drugs, Evaporation, Lithography, Polymers, Separation (Technology)
Proceedings Papers

Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology

Available to Purchase

R. Ghodssi, D. J. Beebe, V. White, D. D. Denton
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 379-386, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1378
https://doi.org/10.1115/IMECE1996-1378
View Paper titled, Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology
Open the PDF for Development of a Tangential Tactor Using a LIGA/MEMS Linear Microactuator Technology in another window
Topics: Microactuators, Microelectromechanical systems, Skin, Design, Electroplating, Lithography, Manganese (Metal), Microfabrication, Microscale devices, Molding
Proceedings Papers

Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes

Free

Masato Ikegawa
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 183, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1044
https://doi.org/10.1115/IMECE1996-1044
View Paper titled, Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes
Open the PDF for Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes in another window
Topics: Flow (Dynamics), Heat transfer, Integrated circuit fabrication, Semiconductor wafers, Manufacturing, Particulate matter, Chemical reactions, Chemical vapor deposition, Contamination, Etching
Proceedings Papers

Design, Fabrication and Testing of a Novel Thermally-Actuated Tesla Valve (TATV): A Hybrid Microvalve

Available to Purchase

Jonghyun Lee, Ashok Thyagarajan, Alaba Bamido, Nandan Shettigar, Debjyoti Banerjee
Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A022, October 30–November 3, 2022
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2022-96265
https://doi.org/10.1115/IMECE2022-96265
View Paper titled, Design, Fabrication and Testing of a Novel Thermally-Actuated Tesla Valve (TATV): A Hybrid Microvalve
Open the PDF for Design, Fabrication and Testing of a Novel Thermally-Actuated Tesla Valve (TATV): A Hybrid Microvalve in another window
Topics: Design, Lithography, Manufacturing, Testing, Valves
Proceedings Papers

A Large Stroke, Nanometer Precision X-Y Stage for Lithography

Available to Purchase

Lowell D. Jones, Jeffrey S. N. Paine
Proc. ASME. IMECE98, Adaptive Structures and Material Systems, 89-94, November 15–20, 1998
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1998-0942
https://doi.org/10.1115/IMECE1998-0942
View Paper titled, A Large Stroke, Nanometer Precision X-Y Stage for Lithography
Open the PDF for A Large Stroke, Nanometer Precision X-Y Stage for Lithography in another window
Topics: Lithography, Design, Heat, Actuators, Cables, Flexure mechanisms, Inertia (Mechanics), Innovation, Magnetic levitation, Microelectronic devices
Proceedings Papers

Fabrication of High-Index Refractive Microlenses for Near-Field Optics

Available to Purchase

D. A. Fletcher, K. B. Crozier, G. S. Kino, C. F. Quate, K. E. Goodson
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 289-294, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0282
https://doi.org/10.1115/IMECE1999-0282
View Paper titled, Fabrication of High-Index Refractive Microlenses for Near-Field Optics
Open the PDF for Fabrication of High-Index Refractive Microlenses for Near-Field Optics in another window
Topics: Manufacturing, Optics, Resolution (Optics), Lenses (Optics), Silicon, Diffraction, Refractive index, Spectroscopy, Temperature measurement, Wavelength
Proceedings Papers

Drag Reduction on Microscale Concave-Convex Surface

Available to Purchase

Masato Hasegawa, Hideki Nariai, Kazufumi Kaneko, Hiroshi Maki, Akira Yabe, Sohei Matsumoto
Proc. ASME. IMECE99, Heat Transfer: Volume 1, 317-322, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-0999
https://doi.org/10.1115/IMECE1999-0999
View Paper titled, Drag Reduction on Microscale Concave-Convex Surface
Open the PDF for Drag Reduction on Microscale Concave-Convex Surface in another window
Topics: Drag reduction, Microscale devices, Filters, Friction, Reactive-ion etching, Reynolds number, Bubbles, Coating processes, Coatings, Drops
Proceedings Papers

Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS

Available to Purchase

Cheng Sun, Nicholas Fang, Xiang Zhang
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 813-818, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23916
https://doi.org/10.1115/IMECE2001/MEMS-23916
View Paper titled, Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS
Open the PDF for Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS in another window
Topics: Lithography, Microelectromechanical systems, Modeling, Manufacturing, Chemical properties, Hardening (Curing), Resins, Resolution (Optics), Springs, Ultraviolet radiation
Proceedings Papers

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Available to Purchase

Gary O’Brien, Xing Cheng, L. J. Guo
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 427-431, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23863
https://doi.org/10.1115/IMECE2001/MEMS-23863
View Paper titled, Deep Reactive Ion Etched Submicron Beam/Trench Characterization
Open the PDF for Deep Reactive Ion Etched Submicron Beam/Trench Characterization in another window
Topics: Chemistry, Cycles, Etching, Lithography, Microelectromechanical systems, Plasmas (Ionized gases), Reactive-ion etching, Semiconductor wafers, Silicon
Proceedings Papers

Creation of Nanometer-Sized Features in Polysilicon Using Fusing

Available to Purchase

Jeremy A. Levitan, Dan Good, Michael J. Sinclair, Joseph M. Jacobson
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 397-402, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23858
https://doi.org/10.1115/IMECE2001/MEMS-23858
View Paper titled, Creation of Nanometer-Sized Features in Polysilicon Using Fusing
Open the PDF for Creation of Nanometer-Sized Features in Polysilicon Using Fusing in another window
Topics: Microelectromechanical systems, Polysilicon, Microfabrication, Manufacturing, Resolution (Optics), Dimensions, Electrons, Lithography, Melting, Semiconductors (Materials)
Proceedings Papers

Design and Analysis of a Miniature Rotary Wankel Compressor

Available to Purchase

G. W. Finger, J. S. Kapat, L. C. Chow
Proc. ASME. IMECE2001, Advanced Energy Systems, 309-316, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/AES-23637
https://doi.org/10.1115/IMECE2001/AES-23637
View Paper titled, Design and Analysis of a Miniature Rotary Wankel Compressor
Open the PDF for Design and Analysis of a Miniature Rotary Wankel Compressor in another window
Topics: Compressors, Design, Rotors, Energy / power systems, Gates (Closures), Lithography, Electrical discharge machining, Pressure, Stress, Brayton cycle
Proceedings Papers

Smart Structures Technology As Part of Integrated Tool Management in Lithography Scanners

Available to Purchase

Betsy Marsh, Baruch Pletner, Huck Dorn
Proc. ASME. IMECE2001, Adaptive Structures and Material Systems, 1-8, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/AD-23700
https://doi.org/10.1115/IMECE2001/AD-23700
View Paper titled, Smart Structures Technology As Part of Integrated Tool Management in Lithography Scanners
Open the PDF for Smart Structures Technology As Part of Integrated Tool Management in Lithography Scanners in another window
Topics: Lithography, Smart structures, Actuators, Structural elements (Construction), Trajectories (Physics), Vibration, Control systems, Metrology, Chain, Dampers
Proceedings Papers

Design and Analysis of a Miniature Rotary Wankel Compressor

Available to Purchase

G. W. Finger, J. S. Kapat, L. C. Chow
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 881-888, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23926
https://doi.org/10.1115/IMECE2001/MEMS-23926
View Paper titled, Design and Analysis of a Miniature Rotary Wankel Compressor
Open the PDF for Design and Analysis of a Miniature Rotary Wankel Compressor in another window
Topics: Compressors, Design, Microelectromechanical systems, Rotors, Energy / power systems, Gates (Closures), Lithography, Electrical discharge machining, Pressure, Stress
Proceedings Papers

Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases

Available to Purchase

Stephen E. Vargo, Amanda A. Green, E. P. Muntz
Proc. ASME. IMECE2000, Heat Transfer: Volume 2, 307-314, November 5–10, 2000
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2000-1440
https://doi.org/10.1115/IMECE2000-1440
View Paper titled, Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases
Open the PDF for Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases in another window
Topics: Gases, Heat transfer, Microelectromechanical systems, Transpiration, Vacuum pumps, Compressors, Instrumentation, Contamination, Engineering simulation, Flow (Dynamics)
Proceedings Papers

Three-Dimensional Printing of Carbon Nanostructures

Available to Purchase

Alex Resnick, Jungkyu Park, Biya Haile, Eduardo B. Farfán
Proc. ASME. IMECE2019, Volume 12: Advanced Materials: Design, Processing, Characterization, and Applications, V012T10A027, November 11–14, 2019
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2019-11411
https://doi.org/10.1115/IMECE2019-11411
View Paper titled, Three-Dimensional Printing of Carbon Nanostructures
Open the PDF for Three-Dimensional Printing of Carbon Nanostructures in another window
Topics: Additive manufacturing, Carbon, Nanostructures , Graphene, Chemical vapor deposition, Thermal properties, Carbon nanotubes, Cutting, Degrees of freedom, Flexible electronics
Proceedings Papers

Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors

Available to Purchase

Ding Yuan, Ming Zhang, Yu Zhu, Xin Li, Leijie Wang
Proc. ASME. IMECE2018, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A007, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-87007
https://doi.org/10.1115/IMECE2018-87007
View Paper titled, Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors
Open the PDF for Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors in another window
Topics: Motors, Permanent magnets, Rotation, Engineering simulation, Lithography, Machinery, Simulation
Proceedings Papers

Photosensitivity of Monolayer Graphene-Base Field Effect Transistor

Available to Purchase

Jowesh Avisheik Goundar, Ken Suzuki, Hideo Miura
Proc. ASME. IMECE2018, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A013, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-87245
https://doi.org/10.1115/IMECE2018-87245
View Paper titled, Photosensitivity of Monolayer Graphene-Base Field Effect Transistor
Open the PDF for Photosensitivity of Monolayer Graphene-Base Field Effect Transistor in another window
Topics: Graphene, Transistors, Temperature, Chemical vapor deposition, Silicon, Brightness (Photometry), Cathode ray oscilloscopes, Copper foil, Electrodes, Electron beams
Proceedings Papers

Transition From Planar Stratified Flow in Converging Microchannels

Available to Purchase

Zachary Lamberty, Minseo Park, Nelson Macken, Adam T. Melvin
Proc. ASME. IMECE2018, Volume 7: Fluids Engineering, V007T09A058, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-86289
https://doi.org/10.1115/IMECE2018-86289
View Paper titled, Transition From Planar Stratified Flow in Converging Microchannels
Open the PDF for Transition From Planar Stratified Flow in Converging Microchannels in another window
Topics: Microchannels, Stratified flow, Flow (Dynamics), Reynolds number, Fluids, Junctions, Dimensions, Microfluidics, Bonding, Flow visualization
Proceedings Papers

Dynamic Exposure Model of Scanning Beam Interference Lithography

Available to Purchase

Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang
Proc. ASME. IMECE2018, Volume 4A: Dynamics, Vibration, and Control, V04AT06A004, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-86979
https://doi.org/10.1115/IMECE2018-86979
View Paper titled, Dynamic Exposure Model of Scanning Beam Interference Lithography
Open the PDF for Dynamic Exposure Model of Scanning Beam Interference Lithography in another window
Topics: Lithography, Photoresists, Diffraction gratings, Process simulation