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Proceedings Papers

Design, Fabrication and Testing of a Novel Thermally-Actuated Tesla Valve (TATV): A Hybrid Microvalve

Jonghyun Lee, Ashok Thyagarajan, Alaba Bamido, Nandan Shettigar, Debjyoti Banerjee

Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A022, October 30–November 3, 2022

Paper No: IMECE2022-96265

DOI: https://doi.org/10.1115/IMECE2022-96265

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Topics: Design, Lithography, Manufacturing, Testing, Valves

Proceedings Papers

A Large Stroke, Nanometer Precision X-Y Stage for Lithography

Lowell D. Jones, Jeffrey S. N. Paine

Proc. ASME. IMECE98, Adaptive Structures and Material Systems, 89-94, November 15–20, 1998

Paper No: IMECE1998-0942

DOI: https://doi.org/10.1115/IMECE1998-0942

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Topics: Lithography, Design, Heat, Actuators, Cables, Flexure mechanisms, Inertia (Mechanics), Innovation, Magnetic levitation, Microelectronic devices

Proceedings Papers

Drag Reduction on Microscale Concave-Convex Surface

Masato Hasegawa, Hideki Nariai, Kazufumi Kaneko, Hiroshi Maki, Akira Yabe, Sohei Matsumoto

Proc. ASME. IMECE99, Heat Transfer: Volume 1, 317-322, November 14–19, 1999

Paper No: IMECE1999-0999

DOI: https://doi.org/10.1115/IMECE1999-0999

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Topics: Drag reduction, Microscale devices, Filters, Friction, Reactive-ion etching, Reynolds number, Bubbles, Coating processes, Coatings, Drops

Proceedings Papers

Fabrication of High-Index Refractive Microlenses for Near-Field Optics

D. A. Fletcher, K. B. Crozier, G. S. Kino, C. F. Quate, K. E. Goodson

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 289-294, November 14–19, 1999

Paper No: IMECE1999-0282

DOI: https://doi.org/10.1115/IMECE1999-0282

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Topics: Manufacturing, Optics, Resolution (Optics), Lenses (Optics), Silicon, Diffraction, Refractive index, Spectroscopy, Temperature measurement, Wavelength

Proceedings Papers

Smart Structures Technology As Part of Integrated Tool Management in Lithography Scanners

Betsy Marsh, Baruch Pletner, Huck Dorn

Proc. ASME. IMECE2001, Adaptive Structures and Material Systems, 1-8, November 11–16, 2001

Paper No: IMECE2001/AD-23700

DOI: https://doi.org/10.1115/IMECE2001/AD-23700

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Topics: Lithography, Smart structures, Actuators, Structural elements (Construction), Trajectories (Physics), Vibration, Control systems, Metrology, Chain, Dampers

Proceedings Papers

Design and Analysis of a Miniature Rotary Wankel Compressor

G. W. Finger, J. S. Kapat, L. C. Chow

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 881-888, November 11–16, 2001

Paper No: IMECE2001/MEMS-23926

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23926

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Topics: Compressors, Design, Microelectromechanical systems, Rotors, Energy / power systems, Gates (Closures), Lithography, Electrical discharge machining, Pressure, Stress

Proceedings Papers

Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS

Cheng Sun, Nicholas Fang, Xiang Zhang

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 813-818, November 11–16, 2001

Paper No: IMECE2001/MEMS-23916

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23916

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Topics: Lithography, Microelectromechanical systems, Modeling, Manufacturing, Chemical properties, Hardening (Curing), Resins, Resolution (Optics), Springs, Ultraviolet radiation

Proceedings Papers

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Gary O’Brien, Xing Cheng, L. J. Guo

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 427-431, November 11–16, 2001

Paper No: IMECE2001/MEMS-23863

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23863

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Topics: Chemistry, Cycles, Etching, Lithography, Microelectromechanical systems, Plasmas (Ionized gases), Reactive-ion etching, Semiconductor wafers, Silicon

Proceedings Papers

Creation of Nanometer-Sized Features in Polysilicon Using Fusing

Jeremy A. Levitan, Dan Good, Michael J. Sinclair, Joseph M. Jacobson

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 397-402, November 11–16, 2001

Paper No: IMECE2001/MEMS-23858

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23858

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Topics: Microelectromechanical systems, Polysilicon, Microfabrication, Manufacturing, Resolution (Optics), Dimensions, Electrons, Lithography, Melting, Semiconductors (Materials)

Proceedings Papers

Design and Analysis of a Miniature Rotary Wankel Compressor

G. W. Finger, J. S. Kapat, L. C. Chow

Proc. ASME. IMECE2001, Advanced Energy Systems, 309-316, November 11–16, 2001

Paper No: IMECE2001/AES-23637

DOI: https://doi.org/10.1115/IMECE2001/AES-23637

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Topics: Compressors, Design, Rotors, Energy / power systems, Gates (Closures), Lithography, Electrical discharge machining, Pressure, Stress, Brayton cycle

Proceedings Papers

Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases

Stephen E. Vargo, Amanda A. Green, E. P. Muntz

Proc. ASME. IMECE2000, Heat Transfer: Volume 2, 307-314, November 5–10, 2000

Paper No: IMECE2000-1440

DOI: https://doi.org/10.1115/IMECE2000-1440

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Topics: Gases, Heat transfer, Microelectromechanical systems, Transpiration, Vacuum pumps, Compressors, Instrumentation, Contamination, Engineering simulation, Flow (Dynamics)

Proceedings Papers

Three-Dimensional Printing of Carbon Nanostructures

Alex Resnick, Jungkyu Park, Biya Haile, Eduardo B. Farfán

Proc. ASME. IMECE2019, Volume 12: Advanced Materials: Design, Processing, Characterization, and Applications, V012T10A027, November 11–14, 2019

Paper No: IMECE2019-11411

DOI: https://doi.org/10.1115/IMECE2019-11411

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Topics: Additive manufacturing, Carbon, Nanostructures , Graphene, Chemical vapor deposition, Thermal properties, Carbon nanotubes, Cutting, Degrees of freedom, Flexible electronics

Proceedings Papers

Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors

Ding Yuan, Ming Zhang, Yu Zhu, Xin Li, Leijie Wang

Proc. ASME. IMECE2018, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A007, November 9–15, 2018

Paper No: IMECE2018-87007

DOI: https://doi.org/10.1115/IMECE2018-87007

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Topics: Motors, Permanent magnets, Rotation, Engineering simulation, Lithography, Machinery, Simulation

Proceedings Papers

Photosensitivity of Monolayer Graphene-Base Field Effect Transistor

Jowesh Avisheik Goundar, Ken Suzuki, Hideo Miura

Proc. ASME. IMECE2018, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A013, November 9–15, 2018

Paper No: IMECE2018-87245

DOI: https://doi.org/10.1115/IMECE2018-87245

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Topics: Graphene, Transistors, Temperature, Chemical vapor deposition, Silicon, Brightness (Photometry), Cathode ray oscilloscopes, Copper foil, Electrodes, Electron beams

Proceedings Papers

Transition From Planar Stratified Flow in Converging Microchannels

Zachary Lamberty, Minseo Park, Nelson Macken, Adam T. Melvin

Proc. ASME. IMECE2018, Volume 7: Fluids Engineering, V007T09A058, November 9–15, 2018

Paper No: IMECE2018-86289

DOI: https://doi.org/10.1115/IMECE2018-86289

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Topics: Microchannels, Stratified flow, Flow (Dynamics), Reynolds number, Fluids, Junctions, Dimensions, Microfluidics, Bonding, Flow visualization

Proceedings Papers

Dynamic Exposure Model of Scanning Beam Interference Lithography

Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang

Proc. ASME. IMECE2018, Volume 4A: Dynamics, Vibration, and Control, V04AT06A004, November 9–15, 2018

Paper No: IMECE2018-86979

DOI: https://doi.org/10.1115/IMECE2018-86979

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Topics: Lithography, Photoresists, Diffraction gratings, Process simulation

Proceedings Papers

Direct Measurement of the Particle-Induced Flow Structure in a Confined Microchannel

Runlin Zhang, Zhenhai Pan, Huiying Wu

Proc. ASME. IMECE2017, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A034, November 3–9, 2017

Paper No: IMECE2017-72272

DOI: https://doi.org/10.1115/IMECE2017-72272

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Topics: Flow (Dynamics), Microchannels, Particulate matter, Microparticles, Confined flow, Equilibrium (Physics), Fluid dynamics, Fluids, Geometry, Lithography

Proceedings Papers

Characterizing the High Reynolds Number Regime for Deterministic Lateral Displacement (DLD) Devices

Brian Dincau, Arian Aghilinejad, Jong-Hoon Kim, Xiaolin Chen

Proc. ASME. IMECE2017, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A033, November 3–9, 2017

Paper No: IMECE2017-71892

DOI: https://doi.org/10.1115/IMECE2017-71892

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Topics: Displacement, Reynolds number, Particulate matter, Columns (Structural), Flow (Dynamics), Separation (Technology), Fluids, Laminar flow, Computer simulation, Computer software

Proceedings Papers

Scanning Kelvin Probe Microscopy Study of Mg-Zn-Ca Alloys

Svitlana Fialkova, Zhigang Xu, Devdas Pai, Jagannathan Sankar

Proc. ASME. IMECE2017, Volume 14: Emerging Technologies; Materials: Genetics to Structures; Safety Engineering and Risk Analysis, V014T11A038, November 3–9, 2017

Paper No: IMECE2017-72285

DOI: https://doi.org/10.1115/IMECE2017-72285

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Topics: Alloys, Microscopy, Probes, Corrosion, Atomic force microscopy, Particulate matter, Chemical properties, Circuits, Fundamental forces (Physics), Grain boundaries

Proceedings Papers

Microfluidic Systems for Studying Chemical Reactions, Mixing, and Heat Transfer

Richard Y. Chiou, Michael G. Mauk, Dharma T. Varapula, Senyu Wang, Carlos Ruiz, Tzu-Liang (Bill) Tseng

Proc. ASME. IMECE2017, Volume 5: Education and Globalization, V005T06A024, November 3–9, 2017

Paper No: IMECE2017-72307

DOI: https://doi.org/10.1115/IMECE2017-72307

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Topics: Chemical reactions, Heat transfer, Microfluidics, Students, Computer-aided design, Design, Machining, Process control, Pumps, Sensors

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NARROW

Design, Fabrication and Testing of a Novel Thermally-Actuated Tesla Valve (TATV): A Hybrid Microvalve

A Large Stroke, Nanometer Precision X-Y Stage for Lithography

Drag Reduction on Microscale Concave-Convex Surface

Fabrication of High-Index Refractive Microlenses for Near-Field Optics

Smart Structures Technology As Part of Integrated Tool Management in Lithography Scanners

Design and Analysis of a Miniature Rotary Wankel Compressor

Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Creation of Nanometer-Sized Features in Polysilicon Using Fusing

Design and Analysis of a Miniature Rotary Wankel Compressor

Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases

Three-Dimensional Printing of Carbon Nanostructures

Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors

Photosensitivity of Monolayer Graphene-Base Field Effect Transistor

Transition From Planar Stratified Flow in Converging Microchannels

Dynamic Exposure Model of Scanning Beam Interference Lithography

Direct Measurement of the Particle-Induced Flow Structure in a Confined Microchannel

Characterizing the High Reynolds Number Regime for Deterministic Lateral Displacement (DLD) Devices

Scanning Kelvin Probe Microscopy Study of Mg-Zn-Ca Alloys

Microfluidic Systems for Studying Chemical Reactions, Mixing, and Heat Transfer

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