Abstract
Injection molding technique for the replication of polymeric microstructures is demonstrated. By means of appropriate process control, traditional injection molding technique can be applied for the replication of polymeric microstructures. Using wet-etched silicon wafers as mold inserts, we have successfully predicted, improved, and optimized the replication results. The behavior of polymer melt in micro mold cavity is characterized by both experimental and simulation results. Temperature parameters are identified as the key factors that decisively determine the quality of molded microstructures. Optimization of the molding process is performed using simulation and experiment evaluation approach. This technique has potential applications for MEMS fabrication at relatively lower cost with a short cycle time. We believe this adoption of the injection molding process to micro-fabrication will lead to a promising technique for MEMS devices.
