Abstract
We have demonstrated a stiction study methodology on the microscale via an electrostatically actuated polysilicon parallel plate capacitor. The actuator was used to cause physical contact between two polysilicon microstructures. C-V (capacitance-voltage) plots were used to extract mechanical parameters, including surface energy (J/m2), force of adhesion (N), and spring constant (N/m). An average surface energy of 8.9 mJ/m2 with corresponding standard deviation (σ) of 0.8 mJ/m2 was observed regarding polysilicon adhesion. The average force of adhesion was calculated to be 13.3 μN (σ = 1.2 μN) for a contact surface area of 1.256 × 10−9 m2. The calculated Z-axis spring constant was 15.9 N/m (σ = 1.6 N/m) as compared to the theoretical value of 16.8 N/m.
