Abstract

A new normally-closed 3-way microvalve for pneumatic applications is presented. The valve is driven by a bimetallic actuation principle. This paper will discuss the dimensioning and design, the fabrication and the experimental results of the 3-way valve. The valve is designed to control differential pressures of 1000 kPa. Flow rates up to 800 ml/min for dry air at 600 kPa can be achieved. The power consumption is approximately 1.5 W. The valve has been tested successfully in an ambient temperature ranging from 0° to 50°C.

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