Abstract

A new aluminum based valveless fluid micropump is designed by micromachining method. The pump consists of two fluid diffuser/nozzle elements on each side of a chamber with an oscillating diaphragm which is actuated with a piezoelectric disc. The two simultaneously vibrating diaphragms produce a large oscillating chamber volume. To obtain the optimal structural parameters at the design stage of the pump, the ANSYS finite element software is used for the simulation. The pump prototype with two aluminum diaphragms of ϕ10mm × 0.1mm has been simulated. The chamber oscillating volume can reach as high as 800μl for water pumping.

Volume Subject Area:
Structural Dynamics and Acoustics
Keywords:
micropump, aluminum, micromachining, ANSYS simulation, piezoelectric, optimization
Topics:
Aluminum, Micromachining, Micropumps, Optimization, Simulation
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Copyright © 1998 by The American Society of Mechanical Engineers
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