For modern diagnostic and therapeutic methods new miniaturized analytical components and surgical tools are needed. This becomes obvious in the fields of endoscopic treatments or catheter based interventions. Since cleaning and sterilization of miniaturized devices is difficult or even impossible many of these tools are expected to be disposable. Therefore, they should be available at reasonable prices which can be achieved by batch fabrication of the devices. Using the LIGA technique diverse polymers and metals can be patterned which enables numerous applications. Turbines, pumps, valves, lenses, and spectrometers are developed for the use in minimally invasive therapy.