Abstract
The damping characteristics of microcantilevers were clarified analytically and experimentally as a step towards developing next-generation information systems that use micromechanical devices. First, an approximate formula of airflow damping is derived using the Navier-Stokes equation and the total damping is obtained by combining this with internal friction and support loss. Precise measurement apparatus was then developed to verify the theory. The damping ratio of cantilevers ranging from 0.1 mm to 100 mm in length was measured and the effects of beam size, vibrational mode number, and vibrational amplitude on damping ratio were studied. Finally the relationship between vibrational damping and mechanical design parameters were summarized so that the results can be utilized in the actual design.
