We calculated the heat transfer caused by electron tunneling between two semi-infinite metal plates separated by a vacuum gap, which are made of the same material. The tunneling of electron is described by one dimensional quantum tunneling and its transmission coefficient. Sommerfeld model is used to derive the math expression of electron motion. Based on calculation results, we find that when the gap distance is below 1 nm, electron tunneling induced heat transfer starts to be considerable, which could exceed near-filed radiative heat transfer.

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