This study aims to evaluate the wear resistance of magnesium - ceramics nano-layered thin films using atomic force microscopy technique (AFM). The magnesium - ceramics (alumina and silica) nano-layered thin films were deposited on glass substrate using DC and pulsed DC reactive magnetron sputtering process. The surface roughness and wear properties were evaluated with the single crystal diamond tip. It was observed that the surface roughness was increased with the growing of number of layers for both magnesium-ceramics films. The nano-tribology test shown a strong adhesion between Mg-ceramic layers. The results shown that alumina nanolayers more efficient to resist against wear than silica. It was also noted that magnesium-silica nanolaminates loosing wear-resistance with the increasing number of layers.

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