This paper reports the effect of particulate contaminants on the static stress response of cantilever type micro-electromechanical systems (MEMS) devices, such as high precision MEMS pressure sensor. The contaminant presence has been qualitatively verified through computational fluid dynamic simulation of the clean room in COMSOL Multiphysics environment and quantitatively estimated for adverse conditions such as ISO-8 cleanliness. There is very little characterization of such impairing of response of cantilever systems though it has well been recognized to be important. Fabrication of MEMS based multi-functional devices demands complex integration of several micro-engineered components to perfection. It is therefore critical to ensure that at every stage of fabrication the contaminants or particles that get deposited on the device parts do not have any deleterious effect on the device performance. As most of the MEMS based devices are fabricated in a clean room environment the effects of contaminants on the device performance is assumed to be minimal. However, if the components are exposed to adverse conditions of cleanliness due to non-functional cleanroom or poor maintenance of cleanroom, the unaccounted mass of contaminants on the cantilever device can affect the static and dynamics response as well as the resonance characteristics. Thus it is important to understand performance with respect to various clean room parameters such as particulate density, temperature and humidity especially for the devices designed to measure very low values of physical/electrical/mechanical parameters.

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