Uncertainty Quantification for Cantilever Based MEMS Switches Considering Bouncing Dynamics Available to Purchase

Design methods of MEMS switches are typically based on deterministic approaches, where the parameters such as geometrical and physical properties as well as the operating conditions that characterize the behavior of systems are assumed to be known precisely. However, in practice, due to the batch-production processes used in MEMS fabrication as well as the micron-scale dimensions of the structural elements, consideration of uncertainties in system parameters and an understanding of their effects are warranted and should be investigated in order to improve the switch performance and reliability. The primary purpose of the present paper is to perform uncertainty quantification predictions for MEMS switches based on the transient dynamic response, in particular, the bouncing behavior. A suitable mathematical model that captures the bouncing dynamics and previously validated via experiments is employed for this purpose. In particular, quantification of performance in terms of second order statistics is performed to predict propagation of uncertainties in Young’s modulus, beam width, beam thickness as well as actuation voltage. The influence of these uncertainties on significant switch performance parameters such as initial bounce time as well as maximum bounce height have been quantified.