To analyze structural dynamic response of rotary ultrasonic motor under high impact load, a theoretical model is established in this paper. A rotary ultrasonic motor includes two main components: stator and rotor. According to structure form and movement principle, they can be simplified as annular plates. When the system is imparted an impact load, dynamic displacement response of stator and rotor can be obtained. The damage to stator and rotor is analyzed in theory. It gave agreement with simulation and experimental result. Finally, influence of various structure parameters on the deformation of stator and rotor is analyzed and some suggestions on improving performance of rotary type ultrasonic motor are proposed.

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