Diamond-like carbon (DLC) films have excellent tribological properties. These include low friction, high wear resistance, high corrosion resistance, and a high anti-seizure resistance. DLC film with and without Si doping (due to its promising effect on friction coefficient), at approximately 1–2 μm thickness, was synthesized by a reactive ion plating method using C6H6 source on WC-Co substrate. Si addition on tribological properties of DLC was evaluated. The effects of relative humidity and contact load are also investigated. When the Si content was increased above 5.9 at. %, tribological properties of the coating were deteriorated. These properties are, however, affected by film deposition parameters and sliding conditions such as normal load, sliding speed, mating materials, and atmospheric conditions. The effect of environment is particularly significant.

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