Based on the coupled theory, a simple explicit solution of piezoresponse force microscopy (PFM) in determining the effective piezoelectric coefficient for an ultra-thin transversely isotropic piezoelectric film bonded to a rigid conducting substrate is obtained, using the Taylor expansion and homogeneous assumption. And it is found to be exactly the same as the well-known result for the case of piezoelectric thin film clamped between flat rigid electrodes for homogeneous external electric field. The electric charge and the distance from the image charge model are also derived and the influences of the film thickness and substrate permittivity on the effective piezoelectric coefficient are then discussed. The obtained results can be used to quantitatively interpret the PFM signals and directly detect the piezoelectric constant through PFM for an ultra-thin film or supply important information for constructing a reliable formula to describe the thickness effect.
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ASME 2015 International Mechanical Engineering Congress and Exposition
November 13–19, 2015
Houston, Texas, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-5752-6
PROCEEDINGS PAPER
Asymptotic Effective Piezoelectric Coefficient Solution of Piezoresponse Force Microscopy for a Transversely Isotropic Piezoelectric Film
J. H. Wang,
J. H. Wang
Northwestern Polytechnical University, Xi'an, China
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C. Q. Chen
C. Q. Chen
Tsinghua University, Beijing, China
Search for other works by this author on:
J. H. Wang
Northwestern Polytechnical University, Xi'an, China
C. Q. Chen
Tsinghua University, Beijing, China
Paper No:
IMECE2015-51276, V009T12A034; 5 pages
Published Online:
March 7, 2016
Citation
Wang, JH, & Chen, CQ. "Asymptotic Effective Piezoelectric Coefficient Solution of Piezoresponse Force Microscopy for a Transversely Isotropic Piezoelectric Film." Proceedings of the ASME 2015 International Mechanical Engineering Congress and Exposition. Volume 9: Mechanics of Solids, Structures and Fluids. Houston, Texas, USA. November 13–19, 2015. V009T12A034. ASME. https://doi.org/10.1115/IMECE2015-51276
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