This paper deals with MEMS resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The frequencies of actuation are near natural frequency and near half natural frequency. The frequency response of the simultaneous resonance of the structure is investigated using Reduced Order Model (ROM) method.
ROM of Electrostatically Actuated MEMS Resonators Under Simultaneous Resonances
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Caruntu, DI, & Reyes, C. "ROM of Electrostatically Actuated MEMS Resonators Under Simultaneous Resonances." Proceedings of the ASME 2014 International Mechanical Engineering Congress and Exposition. Volume 4A: Dynamics, Vibration, and Control. Montreal, Quebec, Canada. November 14–20, 2014. V04AT04A045. ASME. https://doi.org/10.1115/IMECE2014-38217
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