A novel and facile method on the Al2O3 nanopore fabrication is proposed for DNA molecule detection based on atomic layer deposition (ALD) technique. We prepare three Al2O3 nanopores by using the focused ion beam (FIB) for the reduction of the thick layer and formation of the nanopore. To prove its feasibility and efficiency, experimental investigation is conducted on characterization of the λ-DNA translocation. As compared with the previously made Si3N4 nanopore, blockade current and time of translocation events are similar, but the signal-to-noise ration is improved.

This content is only available via PDF.
You do not currently have access to this content.