Sensitivity Analysis of Micropart Motion on a Controlled Deformable Continuous Surface

Various approaches have been investigated for micropart (∼250 μm in size) manipulation especially for their controlled positioning for automated assembly of MEMS devices. The motion dynamics of a micropart in a dry-friction environment due to controlled deformation of a continuous flexible surface have been developed and are used to study the sensitivity of micropart motion and micropositioning as function of micropart and surface material properties and input actuator properties. The dynamics consider Van der Waal’s forces, effects of surface deformation profile, relative surface roughness, the dynamic compression of asperities and their effect on the dynamic friction coefficient based on extending Kogut-Etsion friction model through a quasi-dynamic coefficient of friction estimation. The motion of the micropart is affected by these parameters, and it is found that for some combinations of parameters a range exists that could cause motion while outside this range either there is no motion or the micropart detaches from the surface. The understanding of the effects of these parameters on micropart motion could pave the way towards controlled micropart translocation and manipulation employing a continuous flexible surface for microassembly, processes requiring controlled micropart handling for homogeneous or heterogeneous microdevice mass production, or for the development of microconveyor systems.