Carbon nanotubes (CNTs) have received much attention from both the scientific and industrial communities due to their structural properties and unique morphology. There has also been growing interest in vertically aligned single walled carbon nanotubes (VA-SWNTs) because of their suitability for building devices such as solar cells and nanomembrane. Various methods including chemical vapor deposition (CVD) have been developed for growing VA-SWNTs. Among them is alcohol catalytic CVD which is well known for its economic viability, comprehensive substrates selectivity and good yield of VA-SWNTs. This work studies the length assurance of VA-SWNTs growth by an experimental design and an artificial neural network (ANN) metamodel. Process analysis shows that the interaction between gas flow rate and growth time are the most significant input factors. In addition, with high probability flow rate less than 150 sccm and a growth time of 20 minutes are suitable for the repeatability of medium length VA-SWNTs.

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