This paper deals with the problem of static instability of Micro/Nano mirrors under the combined effect of capillary force and Casimir force. At the First the governing equations of the statical behavior of Micro/Nano mirrors under the combined effect of capillary force and casimir force is obtained. The dependency of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that existence of casimir force can considerably reduce the stability limits of nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the casimir force applied to the mirror. Finally analytical tool Homotopy Perturbation Method (HPM) is utilized for prediction of the mirror’s behaviour under combined capillary and casimir forces. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. Results of this paper can be used for successful fabrication of nano/micromirrors using wet etching process where capillary force plays a major role in the system.

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