Microstereolithography (MSL) has been a promising technology for fabrication of three-dimensional (3D) microstructure using layer-by-layer photopolymerization. However, this process produces 3D microstructures with a step corresponding to each layer. We propose in this paper a novel way, termed as ‘Bulk Lithography’, of generating 3D microstructures in single-pass scanning of laser beam over the photopolymer resin of unconstraint depth. In the proposed method, laser energy exposure, being one of the important parameters affecting cured depth, is varied along the line scan to enable fabrication of varying depth structure. Test structure is fabricated with proposed method to illustrate the capability of the proposed process. Lesser fabrication time and step-free 3D microfabrication in the direction perpendicular to the scan plane (z-axis) are the key features of the proposed method.
Skip Nav Destination
ASME 2011 International Mechanical Engineering Congress and Exposition
November 11–17, 2011
Denver, Colorado, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-5497-6
PROCEEDINGS PAPER
3D Microfabrication Using Bulk Lithography
Prasanna Gandhi,
Prasanna Gandhi
Indian Institute of Technology Bombay, Mumbai, MH, India
Search for other works by this author on:
Kiran Bhole
Kiran Bhole
Indian Institute of Technology Bombay, Mumbai, MH, India
Search for other works by this author on:
Prasanna Gandhi
Indian Institute of Technology Bombay, Mumbai, MH, India
Kiran Bhole
Indian Institute of Technology Bombay, Mumbai, MH, India
Paper No:
IMECE2011-62473, pp. 393-399; 7 pages
Published Online:
August 1, 2012
Citation
Gandhi, P, & Bhole, K. "3D Microfabrication Using Bulk Lithography." Proceedings of the ASME 2011 International Mechanical Engineering Congress and Exposition. Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration. Denver, Colorado, USA. November 11–17, 2011. pp. 393-399. ASME. https://doi.org/10.1115/IMECE2011-62473
Download citation file:
34
Views
Related Proceedings Papers
Related Articles
Characterization of “Bulk Lithography” Process for Fabrication of Three-Dimensional Microstructures
J. Micro Nano-Manuf (December,2013)
The Accuracy of Micro-molds Produced by a UV Laser Induced Polymerization
J. Eng. Ind (August,1994)
Layered-Manufacturing of Fiber-Reinforced Composites
J. Manuf. Sci. Eng (August,1999)
Related Chapters
Novel and Efficient Mathematical and Computational Methods for the Analysis and Architecting of Ultralight Cellular Materials and their Macrostructural Responses
Advances in Computers and Information in Engineering Research, Volume 2
Electrohydrodynamic Analysis for an Electrically Enhanced Nanoimprent Lithography
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
Influences of Substrate Preheating on the Laser Rapid Manufacturing Process
Proceedings of the 2010 International Conference on Mechanical, Industrial, and Manufacturing Technologies (MIMT 2010)