Gas Mass Flow Rate Measurement in T-Shaped Microchannels in Slip Flow Regime

A new setup was developed for gas mixing analysis in T-shaped microchannels. The principle of the flow rate measurement was based on the Constant Volume (CV) method [1]. The mass flow rate measurements of two gases N₂ / CO₂ mixing in a T mixer were carried out in the slip flow regime and followed by a simulation work for comparison. The mass flow rate has a magnitude of 10⁻⁸ or 10⁻⁷ kg/s and has good agreement with simulation for the lowest inlet over outlet pressures ratios and moderate agreement for the highest inlet over outlet pressures ratios.