A nanochannel based single molecular sensor was fabricated in poly(methyl methacrylate) substrate by a single step imprinting process with a polymer stamp. The sensor structure consists of hierarchical multiscale patterns of an array of 90 nm (depth) × 190 nm (width) × 80 μm (length) nanochannels and microfluidic networks. In contrast to nanofluidic devices fabricated by high-end nanofabrication tools such as focused ion beam milling and electron beam lithography, this direct imprint process is more desirable for efficient and low cost fabrication. Moreover, due to the reduction of stress generated during imprinting, this polymer stamp imprinting process can also reduce the deformation (warping) in molded substrates, and prevent the damage of expensive nanostructured stamp as well.

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