The dynamic performance of a valveless electromagnetic micropump is studied by a fluid–diaphragm coupling model. The model includes fluid inertia and considers the electromagnetic action on the flexible diaphragm of the pump as a sinusoidal force. Fluid pressure acting on the diaphragm is obtained instantaneously with solving the coupling equation through a transient dynamic mesh simulation. This treatment avoids omitting the phase shift between pressure force and displacement of the diaphragm. Furthermore, the model removes almost empirical parameters. A MEMS prototype is fabricated and the measured backpressure attains to 2.5cmH2O when using a 65mA sinusoidal driving current at frequency of 30Hz.

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