We present a noncontact method to calibrate micro/nanostructures using sub-nN forces. In this work, a microcantilever’s material properties as well as damping ratio are determined using two independent laser systems. A continuous wave laser system is used as a heterodyne interferometer to determine displacements while another laser system is pulsed in order to produce radiation pressure. A noncontact method is preferred while calibrating sub-μN forces since no material is transferred between the calibrating apparatus and (NEMS/MEMS) to be calibrated. The incidence force is calculated from the optical properties of Si cantilever. Simulations presented in this work shows that thermal gradient along the length of the cantilever beam is very small to affect its physical properties due to the difference in time scales on which both operate.
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ASME 2010 International Mechanical Engineering Congress and Exposition
November 12–18, 2010
Vancouver, British Columbia, Canada
Conference Sponsors:
- ASME
ISBN:
978-0-7918-4447-2
PROCEEDINGS PAPER
Use of Radiation Pressure to Calibrate Sub Micro-Newton Forces and Damping Ratios Available to Purchase
Khawar Abbas,
Khawar Abbas
University of New Mexico, Albuquerque, NM
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Seyedhamidreza Alaie,
Seyedhamidreza Alaie
University of New Mexico, Albuquerque, NM
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Mani Hossein-Zadeh,
Mani Hossein-Zadeh
University of New Mexico, Albuquerque, NM
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Zayd C. Leseman
Zayd C. Leseman
University of New Mexico, Albuquerque, NM
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Khawar Abbas
University of New Mexico, Albuquerque, NM
Seyedhamidreza Alaie
University of New Mexico, Albuquerque, NM
Mani Hossein-Zadeh
University of New Mexico, Albuquerque, NM
Zayd C. Leseman
University of New Mexico, Albuquerque, NM
Paper No:
IMECE2010-38984, pp. 57-61; 5 pages
Published Online:
April 30, 2012
Citation
Abbas, K, Alaie, S, Hossein-Zadeh, M, & Leseman, ZC. "Use of Radiation Pressure to Calibrate Sub Micro-Newton Forces and Damping Ratios." Proceedings of the ASME 2010 International Mechanical Engineering Congress and Exposition. Volume 10: Micro and Nano Systems. Vancouver, British Columbia, Canada. November 12–18, 2010. pp. 57-61. ASME. https://doi.org/10.1115/IMECE2010-38984
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