An analytical Mixed Mode I & II crack propagation model is used to analyze the experimental results of stiction failed micro cantilevers on a rigid substrate and to determine the critical strain energy release rate (adhesion energy). Using nonlinear beam deflection theory, the shape of the beam being peeled off of a rigid substrate can be accurately modeled. Results show that the model can fit the experimental data with an average root mean square error of less than 5 ran even at relatively large deflections which happens in some MEMS applications. The effects of surface roughness and/or debris are also explored and contrasted with perfectly (atomically) flat surfaces. Herein it is shown that unlike the macro-scale crack propagation tests, the surface roughness and debris trapped between the micro cantilever and the substrate can drastically effect the energy associated with creating unit new surface areas and also leads to some interesting phenomena. The polysilicon micro cantilever samples used, were fabricated by SUMMIT V™ technology in Sandia National Laboratories and were 1000 μm long, 30 μm wide and 2.6 μm thick.
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ASME 2010 International Mechanical Engineering Congress and Exposition
November 12–18, 2010
Vancouver, British Columbia, Canada
Conference Sponsors:
- ASME
ISBN:
978-0-7918-4447-2
PROCEEDINGS PAPER
Nonlinear Approach for Strain Energy Release Rate in Micro Cantilevers Available to Purchase
Arash Kheyraddini Mousavi,
Arash Kheyraddini Mousavi
University of New Mexico, Albuquerque, NM
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Seyedhamidreza Alaie,
Seyedhamidreza Alaie
University of New Mexico, Albuquerque, NM
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Maheshwar R. Kashamolla,
Maheshwar R. Kashamolla
University of New Mexico, Albuquerque, NM
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Zayd Chad Leseman
Zayd Chad Leseman
University of New Mexico, Albuquerque, NM
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Arash Kheyraddini Mousavi
University of New Mexico, Albuquerque, NM
Seyedhamidreza Alaie
University of New Mexico, Albuquerque, NM
Maheshwar R. Kashamolla
University of New Mexico, Albuquerque, NM
Zayd Chad Leseman
University of New Mexico, Albuquerque, NM
Paper No:
IMECE2010-38905, pp. 51-56; 6 pages
Published Online:
April 30, 2012
Citation
Mousavi, AK, Alaie, S, Kashamolla, MR, & Leseman, ZC. "Nonlinear Approach for Strain Energy Release Rate in Micro Cantilevers." Proceedings of the ASME 2010 International Mechanical Engineering Congress and Exposition. Volume 10: Micro and Nano Systems. Vancouver, British Columbia, Canada. November 12–18, 2010. pp. 51-56. ASME. https://doi.org/10.1115/IMECE2010-38905
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