This paper is concerned with the accuracy and signal detection limits in ultra precision, Microsystems Technologies based inertial sensors. It focuses on conditions that lead to chaotic dynamics, detection of such dynamics. Development of the needed constitutive-empirical, scale-able models is presented and illustrated by example of axially preloaded microflexures. To eliminate uncertainties caused by the accumulation of numerical errors in commonly used engineering software we employ arbitrary precision computations. We detect chaotic dynamics in the investigated systems by means of Poincare map technique to show the evolution of phase space from deterministic to chaotic behavior.1

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