Nanowires are successfully synthesized directly on two types of flexible substrates, Kapton and silicone, to yield integrated compliant assemblies. Reduced temperature catalyst-assisted chemical vapor deposition techniques enable the direct integration processes. The mechanical properties of these assemblies are evaluated using bending tests where tensile or compressive strains are applied to the samples. Crack formation in the form of channeling or debonding, typical of thin films on substrates, is observed. The allowable strain prior to mechanical failure is assessed.

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