The aim of this paper is to apply an Extended Kantorovich method (EKM) to simulate the static deflection of microplates under capillary force. The model accounts for the capillary force nonlinearity of the excitation. Starting from a one term Galerkin approximation and following the Extended Kantorovich procedure, the equations governing the microplate deflection are obtained. These equations are then solved iteratively with a rapid convergence procedure to yield the desired solution. The effects of capillary force on the pull-in phenomenon of microplates are delineated in some figures. It is shown that rapid convergence, high precision and independency of initial guess function makes the EKM an effective and accurate design tool for design optimization.

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