Pump-probe transient thermoreflectance (TTR) techniques are powerful tools for measuring thermophysical properties of thin films, such as thermal conductivity, Λ, or thermal boundary conductance, G. This paper examines the assumption of one-dimensional heating on Λ and G determination in nanostructures using a pump-probe transient thermoreflectance technique. The traditionally used one dimensional and radial (3D) models are reviewed. To test the assumptions of the thermal models, experimental data from Al films on bulk substrates (Si and glass) are taken with the TTR technique. This analysis is extended to thin film multilayer structures. Results show that at 11 MHz modulation frequency, thermal transport is indeed one dimensional. Error among the various models arises due to pulse accumulation and not accounting for residual heating.
ASME 2009 International Mechanical Engineering Congress and Exposition
November 13–19, 2009
Lake Buena Vista, Florida, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-4385-7
PROCEEDINGS PAPER
Dimensionality Analysis of Thermal Transport in Multilayer Thin Film Systems
Patrick E. Hopkins
,
Patrick E. Hopkins
Sandia National Laboratories, Albuquerque, NM
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Justin R. Serrano
,
Justin R. Serrano
Sandia National Laboratories, Albuquerque, NM
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Leslie M. Phinney
,
Leslie M. Phinney
Sandia National Laboratories, Albuquerque, NM
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Sean P. Kearney
,
Sean P. Kearney
Sandia National Laboratories, Albuquerque, NM
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Thomas W. Grasser
,
Thomas W. Grasser
Sandia National Laboratories, Albuquerque, NM
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C. Thomas Harris
C. Thomas Harris
Massachusetts Institute of Technology, Cambridge, MA
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Author Information
Patrick E. Hopkins
Sandia National Laboratories, Albuquerque, NM
Justin R. Serrano
Sandia National Laboratories, Albuquerque, NM
Leslie M. Phinney
Sandia National Laboratories, Albuquerque, NM
Sean P. Kearney
Sandia National Laboratories, Albuquerque, NM
Thomas W. Grasser
Sandia National Laboratories, Albuquerque, NM
C. Thomas Harris
Massachusetts Institute of Technology, Cambridge, MA
Paper No:
IMECE2009-12238, pp. 993-1001; 9 pages
Published Online:
July 8, 2010
Citation
Hopkins, Patrick E., Serrano, Justin R., Phinney, Leslie M., Kearney, Sean P., Grasser, Thomas W., and Harris, C. Thomas. "Dimensionality Analysis of Thermal Transport in Multilayer Thin Film Systems." Proceedings of the ASME 2009 International Mechanical Engineering Congress and Exposition. Volume 12: Micro and Nano Systems, Parts A and B. Lake Buena Vista, Florida, USA. November 13–19, 2009. pp. 993-1001. ASME. https://doi.org/10.1115/IMECE2009-12238
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