In this work, the use of vertically aligned carbon nanotubes (VACNTs) as thermal interface materials is presented. The VACNT structure is fabricated on 4×4 mm silicon substrates using chemical vapor deposition (CVD). These VACNT structures can be transferred to other substrates using a thermocompression bonding process; the process transfers the VACNTs to metalized silicon die which are tested after that as thermal interface materials. Two configurations of VACNTs were tested: one with a full coverage of VACNTs and one with patterned VACNTs. For the full coverage turf a thermal interface resistance as low as 1.082 cm2K/W was obtained, while a thermal interface resistance of 0.044 cm2K/W was obtained for the patterned turfs.
Evaluation of a Thermal Interface Material Fabricated Using Thermocompression Bonding of Carbon Nanotube Turf
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Hamdan, AM, Cho, JH, Johnson, RD, Bahr, DF, Richards, RF, Richards, CD, & Jiao, J. "Evaluation of a Thermal Interface Material Fabricated Using Thermocompression Bonding of Carbon Nanotube Turf." Proceedings of the ASME 2009 International Mechanical Engineering Congress and Exposition. Volume 12: Micro and Nano Systems, Parts A and B. Lake Buena Vista, Florida, USA. November 13–19, 2009. pp. 981-987. ASME. https://doi.org/10.1115/IMECE2009-10990
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