This paper deals with the problem of static instability of nano switches under the effect of Casimir force and electrostatic actuation. The nonlinear fringing field effect has been accounted for in the model. Using a Galerkin decomposition method and considering only one mode, the nonlinear boundary value problem describing the static behavior of nano-switch, is reduced to a nonlinear boundary value ordinary differential equation which is solved using the homotopy perturbation method (HPM). In order to ensure the precision of the results, the number of included terms in the perturbation expansion has been investigated. Results have been compared with numerical results and also with previously published analytical results. It was observed that HPM modifies the overestimation of N/MEMS instability limits reported in the literature and can be used as an effective and accurate design tool in the analysis of N/MEMS.

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