The ability to produce three-dimensional micro- and nanoscale features at low cost is desirable for many applications such as microfluidic devices, micro and nanomechanical systems, photonic crystals and diffractive optics. For example, micro and nanostructures patterned on the sidewalls of microfluidic devices allow better control over the wetting behavior of fluids flowing through the microchannel. In this study we report on a simple and effective process that allows direct integration of microstructures into a microfluidic device via a modified molding process. The key for the process is to use a thin poly(dimethylsiloxane) layer having microgratings as an intermediate stamp which was placed between a brass mold insert with microfluidic features and a PMMA sheet, which was followed by hot embossing. Using this method, we have demonstrated the formation of micropatterns on non-planar surfaces and at the sidewalls of microfluidic devices, as confirmed using scanning electron microscopy. The designed process will fill the gap in current micro- and nanofabrication technologies in that most of the technologies allow for patterning only on planar substrates.

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