Key mechanical requirements for advanced Hard Disk Drive (HDD) recording heads are a minimal flying height and a perfect track following. By applying Micro Electro-mechanical Micro Systems (MEMS) technology, a Slider with an Integrated Microactuator (SLIM) enabling both in a cost competitive way was created. This paper describes the fabrication process for the system’s electromagnetic microatuator and emphasizes the technology enhancements achieved after a process redesign.
Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head
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Saalfeld, H, Dinulovic, D, & Gatzen, HH. "Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head." Proceedings of the ASME 2009 International Mechanical Engineering Congress and Exposition. Volume 12: Micro and Nano Systems, Parts A and B. Lake Buena Vista, Florida, USA. November 13–19, 2009. pp. 235-242. ASME. https://doi.org/10.1115/IMECE2009-11076
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