Application of atomic force microscope (AFM) as a manipulator for pushing-based positioning of nanoparticles has been of considerable interest during recent years. Nevertheless comprehensive researches has been done on modeling and the dynamics analysis of nanoparticle behavior during the positioning process. The development of dynamics modeling of nanoparticle is crucial to have an accurate manipulation. In this paper, a comprehensive model of pushing based manipulation of a nanoparticle by AFM probe is presented. The proposed nanomanipulation model consists of all effective phenomena in nanoscale. Nanoscale interaction forces, elastic deformation in contact areas and friction forces in tip/particle/substrate system are considered. These effects are utilized to derive governing dynamics of the lumped model of AFM and nanoparticle during the manipulation process. The utilized friction models are a modified Coulomb approach and Lund-Grenoble (LuGre) model. The former is a combination of both normal force and contact surface area. The latter is dependent on the velocity of the nanoparticle and leads to stick-slip behavior of the nanoparticle. Finally, the compatibility and effectiveness of the two proposed models are simulated and compared.

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