Miniaturization of macroscopic mechanical systems enables the opening of new areas of application for micro technological systems. Because of actual technological restrictions, especially when applying miniaturized conventional manufacturing techniques, shape and material deviations can not be decreased as strong as the dimensions of the micro parts are reduced. A long-term objective in the development of such systems is to ensure functional capability by adoption of appropriate design measures that compensate these deviations. This work presents methods based on computer simulation that contribute to achieve this objective. One method is based on the utilization of ad-hoc modified and simplified Finite Element Analysis techniques, which now regards some issues of interest from Multi Body Simulation. The introduction of this method also allows studying the behavior of the components and the system with regard to the component’s internal grain structure. When the focus is directed to the robustness or the reliability of the system, another method is presented that is based on a hybrid FEA-MBS solver. It shows better performance both on parameters modeling capability and computational efficiency. Methods to overcome the above mentioned issues, as well as the effects of grain structure on the stress distribution in the individual components will be presented. Some effects affecting the system’s behavior because of this inhomogeneous stress distribution are also discussed. Finally, an investigation about the consequences of having internal defects within individual components is conducted.

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