When designing a MEMS device, both the mechanics and the control logic have to be taken into account due to their strict interaction. The considered MEMS gyroscope is made of vibrating masses suspended through micro-beams with respect to the substrate. To increase the sensitivity of the MEMS gyro (i.e. the displacement of the suspended masses), it has been decided to work at low pressure values (26Pa). At first, the mechanical modelling of the device was carried out, paying special attention to the air damping at low pressure values. Then, the electronics used for the control of the device was integrated into the model thus obtaining a complete description of the sensor allowing to optimize design parameters. In order to validate the developed model, the MEMS sensor was produced and tested.

This content is only available via PDF.
You do not currently have access to this content.