A novel two-parameter area function for determination of near surface properties of Young’s modulus of elasticity and hardness has shown promise for compensating for the imperfection of the tip-end in an instrumented indentation measurement. This paper provides a comprehensive study involving a Berkovitch tip. The tip is utilized in an MTS nanoindentation measurement machine and used to establish load indentation information for fused silica samples. The geometry of the tip is then characterized independently using a highly accurate Atomic Force Microscope. Using the indentation data along with the two-parameter area function methodology, the tip-end radius of curvature is found to provide the most consistent value of modulus of elasticity. Independently, the data from the SEM measurement of the same tip is used to obtain the least squares estimation of the tip curvature. The two approaches yield favorable agreement in the estimation of tip-end radius of curvature. Therefore, the validity of the two-parameter area function method is proved. The method is shown to provide a robust, reliable and accurate measurement of modulus of elasticity and hardness in the nanoscale proximity of a surface.
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ASME 2008 International Mechanical Engineering Congress and Exposition
October 31–November 6, 2008
Boston, Massachusetts, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-4874-6
PROCEEDINGS PAPER
Nano-Scale Indentation Measurement of Material Properties Using an Area Function of the Tip Geometry
S. Ozcan,
S. Ozcan
Southern Illinois University - Carbondale, Carbondale, IL
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K. Farhang,
K. Farhang
Southern Illinois University - Carbondale, Carbondale, IL
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P. Filip
P. Filip
Southern Illinois University - Carbondale, Carbondale, IL
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S. Ozcan
Southern Illinois University - Carbondale, Carbondale, IL
K. Farhang
Southern Illinois University - Carbondale, Carbondale, IL
P. Filip
Southern Illinois University - Carbondale, Carbondale, IL
Paper No:
IMECE2008-68762, pp. 153-161; 9 pages
Published Online:
August 26, 2009
Citation
Ozcan, S, Farhang, K, & Filip, P. "Nano-Scale Indentation Measurement of Material Properties Using an Area Function of the Tip Geometry." Proceedings of the ASME 2008 International Mechanical Engineering Congress and Exposition. Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B. Boston, Massachusetts, USA. October 31–November 6, 2008. pp. 153-161. ASME. https://doi.org/10.1115/IMECE2008-68762
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