Applications of heated tip/surface configuration for micro-/nano-electromechanical systems (MEMS/NEMS) have been widely explored in these years. Since the small gaps in these MEMS/NEMS are comparable to the mean free path of gaseous molecules, the heat transfer via gaseous molecules from the heated tip to the substrate is fundamentally different from macroscopic conduction or convection heat transfer in gases. In this paper, the heat transfer of the rarefied gases heated by hot nano-tip is investigated by means of the Direct Simulation Monte Carlo (DSMC) method. The results show that both tip geometry and tip-substrate distance affect the heat flux density distribution. With the increase of the crossing-angle θ of the nano-tip, the heat flux tends to decrease, while the spatial resolution tends to improve. Moreover, the heat flux density and spatial resolution tend to decrease with the increase of distance between the nano-tip and the substrate. Simulation results provide valuable information for the rational design and optimization of the heated nano-probe for topography applications such as thermally assisted data storage.
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ASME 2008 International Mechanical Engineering Congress and Exposition
October 31–November 6, 2008
Boston, Massachusetts, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-4874-6
PROCEEDINGS PAPER
Study of Heat Transfer of Gas Flow Heated by Nano-Probe via Direct Stimulation Monte Carlo (DSMC) Available to Purchase
Y. W. Yang
Y. W. Yang
Nanyang Technological University, Singapore
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X. J. Liu
Data Storage Institute, Singapore
J. P. Yang
Data Storage Institute, Singapore
Y. W. Yang
Nanyang Technological University, Singapore
Paper No:
IMECE2008-69116, pp. 1287-1290; 4 pages
Published Online:
August 26, 2009
Citation
Liu, XJ, Yang, JP, & Yang, YW. "Study of Heat Transfer of Gas Flow Heated by Nano-Probe via Direct Stimulation Monte Carlo (DSMC)." Proceedings of the ASME 2008 International Mechanical Engineering Congress and Exposition. Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B. Boston, Massachusetts, USA. October 31–November 6, 2008. pp. 1287-1290. ASME. https://doi.org/10.1115/IMECE2008-69116
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