In this paper, we present our recent development of direct nanoimprinting of metal and semiconductor nanoparticles for a simple but high-throughput fabrication of micro/nanoscale structures. Nanoparticle suspension with self-assembled-monolayer (SAM) protected-nanoparticles (Au, Ag, and CdSe-ZnS core-shell quantum dots) suspended in alpha-terpineol carrier solvent are used as solutions for direct nanoimprinting. Polydimethylsiloxane (PDMS)-based soft imprinting molds with micro/nanoscale features are used. Process and material flexibility enable a very low temperature (80°C) and low pressure (5psi) nanoimprinting process and results in superfine features from micrometers down to ∼100nm resolutions. We will show the geometrical and electrical characterization of nanoimprinted structures and demonstrate working electronic components such as resistors or organic field effect transistors (OFET).
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ASME 2007 International Mechanical Engineering Congress and Exposition
November 11–15, 2007
Seattle, Washington, USA
Conference Sponsors:
- ASME
ISBN:
0-7918-4305-X
PROCEEDINGS PAPER
Micro/Nanoscale Structure Fabrication by Direct Nanoimprinting of Metallic and Semiconducting Nanoparticles
Inkyu Park,
Inkyu Park
University of California at Berkeley, Berkeley, CA
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Seung H. Ko,
Seung H. Ko
University of California at Berkeley, Berkeley, CA
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Heng Pan,
Heng Pan
University of California at Berkeley, Berkeley, CA
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Albert P. Pisano,
Albert P. Pisano
University of California at Berkeley, Berkeley, CA
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Costas P. Grigoropoulos
Costas P. Grigoropoulos
University of California at Berkeley, Berkeley, CA
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Inkyu Park
University of California at Berkeley, Berkeley, CA
Seung H. Ko
University of California at Berkeley, Berkeley, CA
Heng Pan
University of California at Berkeley, Berkeley, CA
Albert P. Pisano
University of California at Berkeley, Berkeley, CA
Costas P. Grigoropoulos
University of California at Berkeley, Berkeley, CA
Paper No:
IMECE2007-43878, pp. 307-314; 8 pages
Published Online:
May 22, 2009
Citation
Park, I, Ko, SH, Pan, H, Pisano, AP, & Grigoropoulos, CP. "Micro/Nanoscale Structure Fabrication by Direct Nanoimprinting of Metallic and Semiconducting Nanoparticles." Proceedings of the ASME 2007 International Mechanical Engineering Congress and Exposition. Volume 11: Micro and Nano Systems, Parts A and B. Seattle, Washington, USA. November 11–15, 2007. pp. 307-314. ASME. https://doi.org/10.1115/IMECE2007-43878
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