Trajectory Following of a Micro Motion Stage Based on Closed-Loop FEM Simulation

Micro motion stages are one of the essential components in field of micro robotics and ultra fine positioning systems. This research presents the optimum design of a 3-DOF micro motion stage and its position control using FEM simulation. This stage to be studied uses a 3 RRR flexure hinge base compliant mechanism driven by three piezoelectric stack actuators to provide micro scale planar motion. First of all parametric modeling of the stage will be fulfilled in ANSYS environment utilizing a commercial piezostack and different types of flexure hinges. Hence the Jacobian matrix will be achieved for each case. The optimum selection of the hinge form will be achieved upon results of the previous phase. Finally embedded closed-loop FEM approach in ANSYS programming will be used to follow a specified trajectory. Hereby, flexibilities of mechanism and piezoelectric actuator behavior will be modeled with more reliability than any other analytical approach.