Development of a planar electret based electrostatic micro-generator for vibration energy harvesting is presented. The new harvester has the advantage of possible low cost fabrication and low power losses operation. Moreover, the new harvester uses a slabbed periodic structure allowing the decoupling between the energy conversion cycle and the vibration source frequency. In this paper, the details of this implementation are revealed. Modeling equations of the resulting structure are illustrated and solved numerically. Simulation results are given showing more than 78% improvement in the average output power of the optimized structure compared to previous implementation.

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