This paper presents the design and analysis of a novel MEMS (Micro-Electro-Mechanical System) based auto-focusing system. By combining a folded in-plane optical path design and MEMS microfabricated optical components and comb drive actuator, the auto-focusing function is achieved in a compact system with continuously adjustable imaging distances. Theoretical analysis and numerical simulation validated the feasibility of the design. The auto-focusing system presented in this work is applicable to a wide range of technological fields where high resolution imaging is desired while the space is limited.

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