A three-dimensional nonlinear finite element analysis model is presented to study mixed-mode interfacial delamination for a pull-off test consisting of a thin film strip debonded from a glass substrate. Since the strain energy release rates of all three modes (Mode I, Mode II, and Mode III) and the mode mixities vary along the width of the debond front, prediction of the in-situ shape of the debond front remains an interesting and challenging topic. A cohesive zone model is incorporated into the three-dimensional finite element model to predict the interfacial crack propagation profile for the film deformation regime ranging from bending plate to stretching membrane. This three-dimensional finite element model is found to provide additional insights for interfacial delamination for the pull-off test.

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